8/27/2011	12:27:47 AM	Recipe started at 12:27 AM
8/27/2011	12:27:47 AM	Helium valve closed
8/27/2011	12:27:47 AM	H2 valve closed
8/27/2011	12:27:47 AM	BCl3 valve closed
8/27/2011	12:27:47 AM	PH3 valve closed
8/27/2011	12:27:47 AM	SiCl4 pre valve closed
8/27/2011	12:27:47 AM	SiCl4 post valve closed
8/27/2011	12:27:47 AM	Main Vac valve closed
8/27/2011	12:27:47 AM	Bypass valve closed
8/27/2011	12:27:47 AM	Bubbler valve closed
8/27/2011	12:27:47 AM	Helium MFC set to  0.000000
8/27/2011	12:27:47 AM	H2 MFC set to  0.000000
8/27/2011	12:27:47 AM	BCl3 MFC set to  0.000000
8/27/2011	12:27:47 AM	PHl3 MFC set to  0.000000
8/27/2011	12:27:47 AM	SiCl4 MFC set to  0.000000
8/27/2011	12:27:47 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:27:48 AM	Tube furnace set to 0
8/27/2011	12:27:51 AM	Helium valve closed
8/27/2011	12:27:51 AM	BCl3 valve closed
8/27/2011	12:27:51 AM	PH3 valve closed
8/27/2011	12:27:51 AM	SiCl4 pre valve closed
8/27/2011	12:27:51 AM	SiCl4 post valve closed
8/27/2011	12:27:51 AM	Main Vac valve closed
8/27/2011	12:27:51 AM	Bypass valve closed
8/27/2011	12:27:51 AM	Bubbler valve closed
8/27/2011	12:27:51 AM	H2 valve opened
8/27/2011	12:27:51 AM	Helium MFC set to  0.000000
8/27/2011	12:27:51 AM	H2 MFC set to  500.000000
8/27/2011	12:27:51 AM	BCl3 MFC set to  0.000000
8/27/2011	12:27:51 AM	PHl3 MFC set to  0.000000
8/27/2011	12:27:51 AM	SiCl4 MFC set to  0.000000
8/27/2011	12:27:51 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:27:51 AM	Tube furnace set to 0
8/27/2011	12:28:54 AM	Helium valve closed
8/27/2011	12:28:54 AM	BCl3 valve closed
8/27/2011	12:28:54 AM	PH3 valve closed
8/27/2011	12:28:54 AM	SiCl4 pre valve closed
8/27/2011	12:28:54 AM	SiCl4 post valve closed
8/27/2011	12:28:54 AM	Main Vac valve closed
8/27/2011	12:28:54 AM	Bypass valve closed
8/27/2011	12:28:54 AM	H2 valve opened
8/27/2011	12:28:54 AM	Bubbler valve opened
8/27/2011	12:28:54 AM	Helium MFC set to  0.000000
8/27/2011	12:28:54 AM	H2 MFC set to  500.000000
8/27/2011	12:28:54 AM	BCl3 MFC set to  0.000000
8/27/2011	12:28:54 AM	PHl3 MFC set to  0.000000
8/27/2011	12:28:54 AM	SiCl4 MFC set to  0.000000
8/27/2011	12:28:54 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:28:54 AM	Tube furnace set to 0
8/27/2011	12:28:55 AM	Helium valve closed
8/27/2011	12:28:55 AM	BCl3 valve closed
8/27/2011	12:28:55 AM	PH3 valve closed
8/27/2011	12:28:55 AM	SiCl4 pre valve closed
8/27/2011	12:28:55 AM	SiCl4 post valve closed
8/27/2011	12:28:55 AM	Main Vac valve closed
8/27/2011	12:28:55 AM	Bypass valve closed
8/27/2011	12:28:55 AM	H2 valve opened
8/27/2011	12:28:55 AM	Bubbler valve opened
8/27/2011	12:28:55 AM	Helium MFC set to  0.000000
8/27/2011	12:28:55 AM	H2 MFC set to  500.000000
8/27/2011	12:28:55 AM	BCl3 MFC set to  0.000000
8/27/2011	12:28:55 AM	PHl3 MFC set to  0.000000
8/27/2011	12:28:55 AM	SiCl4 MFC set to  0.000000
8/27/2011	12:28:55 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:28:55 AM	Tube furnace set to 1000
8/27/2011	12:48:55 AM	Helium valve closed
8/27/2011	12:48:55 AM	PH3 valve closed
8/27/2011	12:48:55 AM	SiCl4 post valve closed
8/27/2011	12:48:55 AM	Main Vac valve closed
8/27/2011	12:48:55 AM	Bypass valve closed
8/27/2011	12:48:55 AM	H2 valve opened
8/27/2011	12:48:55 AM	BCl3 valve opened
8/27/2011	12:48:55 AM	SiCl4 pre valve opened
8/27/2011	12:48:55 AM	Bubbler valve opened
8/27/2011	12:48:55 AM	Helium MFC set to  0.000000
8/27/2011	12:48:55 AM	H2 MFC set to  500.000000
8/27/2011	12:48:55 AM	BCl3 MFC set to  2.000000
8/27/2011	12:48:55 AM	PHl3 MFC set to  0.000000
8/27/2011	12:48:55 AM	SiCl4 MFC set to  50.000000
8/27/2011	12:48:55 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:48:55 AM	Tube furnace set to 1000
8/27/2011	12:48:57 AM	Helium valve closed
8/27/2011	12:48:57 AM	PH3 valve closed
8/27/2011	12:48:57 AM	Main Vac valve closed
8/27/2011	12:48:57 AM	Bypass valve closed
8/27/2011	12:48:57 AM	H2 valve opened
8/27/2011	12:48:57 AM	BCl3 valve opened
8/27/2011	12:48:57 AM	SiCl4 pre valve opened
8/27/2011	12:48:57 AM	SiCl4 post valve opened
8/27/2011	12:48:57 AM	Bubbler valve opened
8/27/2011	12:48:57 AM	Helium MFC set to  0.000000
8/27/2011	12:48:57 AM	H2 MFC set to  500.000000
8/27/2011	12:48:57 AM	BCl3 MFC set to  2.000000
8/27/2011	12:48:57 AM	PHl3 MFC set to  0.000000
8/27/2011	12:48:57 AM	SiCl4 MFC set to  50.000000
8/27/2011	12:48:58 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:48:58 AM	Tube furnace set to 1000
8/27/2011	1:03:58 AM	Helium valve closed
8/27/2011	1:03:58 AM	BCl3 valve closed
8/27/2011	1:03:58 AM	PH3 valve closed
8/27/2011	1:03:58 AM	SiCl4 pre valve closed
8/27/2011	1:03:58 AM	SiCl4 post valve closed
8/27/2011	1:03:58 AM	Main Vac valve closed
8/27/2011	1:03:58 AM	Bypass valve closed
8/27/2011	1:03:58 AM	H2 valve opened
8/27/2011	1:03:58 AM	Bubbler valve opened
8/27/2011	1:03:58 AM	Helium MFC set to  0.000000
8/27/2011	1:03:58 AM	H2 MFC set to  500.000000
8/27/2011	1:03:58 AM	BCl3 MFC set to  0.000000
8/27/2011	1:03:58 AM	PHl3 MFC set to  0.000000
8/27/2011	1:03:58 AM	SiCl4 MFC set to  0.000000
8/27/2011	1:03:58 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:03:58 AM	Tube furnace set to 950
8/27/2011	1:08:58 AM	Helium valve closed
8/27/2011	1:08:58 AM	BCl3 valve closed
8/27/2011	1:08:58 AM	PH3 valve closed
8/27/2011	1:08:58 AM	SiCl4 pre valve closed
8/27/2011	1:08:58 AM	SiCl4 post valve closed
8/27/2011	1:08:58 AM	Main Vac valve closed
8/27/2011	1:08:58 AM	Bypass valve closed
8/27/2011	1:08:58 AM	H2 valve opened
8/27/2011	1:08:58 AM	Bubbler valve opened
8/27/2011	1:08:58 AM	Helium MFC set to  0.000000
8/27/2011	1:08:58 AM	H2 MFC set to  500.000000
8/27/2011	1:08:58 AM	BCl3 MFC set to  0.000000
8/27/2011	1:08:58 AM	PHl3 MFC set to  0.000000
8/27/2011	1:08:58 AM	SiCl4 MFC set to  0.000000
8/27/2011	1:08:58 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:08:58 AM	Tube furnace set to 850
8/27/2011	1:13:58 AM	H2 valve closed
8/27/2011	1:13:58 AM	BCl3 valve closed
8/27/2011	1:13:58 AM	PH3 valve closed
8/27/2011	1:13:58 AM	SiCl4 pre valve closed
8/27/2011	1:13:58 AM	SiCl4 post valve closed
8/27/2011	1:13:58 AM	Main Vac valve closed
8/27/2011	1:13:58 AM	Bypass valve closed
8/27/2011	1:13:58 AM	Helium valve opened
8/27/2011	1:13:58 AM	Bubbler valve opened
8/27/2011	1:13:58 AM	Helium MFC set to  500.000000
8/27/2011	1:13:58 AM	H2 MFC set to  0.000000
8/27/2011	1:13:58 AM	BCl3 MFC set to  0.000000
8/27/2011	1:13:58 AM	PHl3 MFC set to  0.000000
8/27/2011	1:13:58 AM	SiCl4 MFC set to  0.000000
8/27/2011	1:13:58 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:13:58 AM	Tube furnace set to 0
8/27/2011	1:27:00 AM	Helium valve closed
8/27/2011	1:27:00 AM	H2 valve closed
8/27/2011	1:27:00 AM	BCl3 valve closed
8/27/2011	1:27:00 AM	PH3 valve closed
8/27/2011	1:27:00 AM	SiCl4 pre valve closed
8/27/2011	1:27:00 AM	SiCl4 post valve closed
8/27/2011	1:27:00 AM	Main Vac valve closed
8/27/2011	1:27:00 AM	Bypass valve closed
8/27/2011	1:27:00 AM	Bubbler valve closed
8/27/2011	1:27:00 AM	Helium MFC set to  0.000000
8/27/2011	1:27:00 AM	H2 MFC set to  0.000000
8/27/2011	1:27:00 AM	BCl3 MFC set to  0.000000
8/27/2011	1:27:00 AM	PHl3 MFC set to  0.000000
8/27/2011	1:27:00 AM	SiCl4 MFC set to  0.000000
8/27/2011	1:27:00 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:27:01 AM	Tube furnace set to 0
8/27/2011	1:27:02 AM	Run finished at 1:27 AM
8/27/2011	1:28:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2011	1:28:49 AM	Recipe started at 1:28 AM
8/27/2011	1:28:49 AM	Helium valve closed
8/27/2011	1:28:49 AM	H2 valve closed
8/27/2011	1:28:49 AM	BCl3 valve closed
8/27/2011	1:28:49 AM	PH3 valve closed
8/27/2011	1:28:49 AM	SiCl4 pre valve closed
8/27/2011	1:28:49 AM	SiCl4 post valve closed
8/27/2011	1:28:49 AM	Main Vac valve closed
8/27/2011	1:28:49 AM	Bubbler valve closed
8/27/2011	1:28:49 AM	Bypass valve opened
8/27/2011	1:28:49 AM	Helium MFC set to  0.000000
8/27/2011	1:28:49 AM	H2 MFC set to  0.000000
8/27/2011	1:28:49 AM	BCl3 MFC set to  0.000000
8/27/2011	1:28:49 AM	PHl3 MFC set to  0.000000
8/27/2011	1:28:49 AM	SiCl4 MFC set to  0.000000
8/27/2011	1:28:49 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:28:49 AM	Tube furnace set to 0
8/27/2011	1:29:47 AM	Helium valve closed
8/27/2011	1:29:48 AM	H2 valve closed
8/27/2011	1:29:48 AM	BCl3 valve closed
8/27/2011	1:29:48 AM	PH3 valve closed
8/27/2011	1:29:48 AM	SiCl4 pre valve closed
8/27/2011	1:29:48 AM	SiCl4 post valve closed
8/27/2011	1:29:48 AM	Main Vac valve closed
8/27/2011	1:29:48 AM	Bubbler valve closed
8/27/2011	1:29:48 AM	Bypass valve opened
8/27/2011	1:29:48 AM	Helium MFC set to  0.000000
8/27/2011	1:29:48 AM	H2 MFC set to  0.000000
8/27/2011	1:29:48 AM	BCl3 MFC set to  0.000000
8/27/2011	1:29:48 AM	PHl3 MFC set to  0.000000
8/27/2011	1:29:48 AM	SiCl4 MFC set to  0.000000
8/27/2011	1:29:48 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:29:48 AM	Tube furnace set to 0
8/27/2011	1:30:48 AM	Helium valve closed
8/27/2011	1:30:48 AM	H2 valve closed
8/27/2011	1:30:48 AM	BCl3 valve closed
8/27/2011	1:30:48 AM	PH3 valve closed
8/27/2011	1:30:48 AM	SiCl4 pre valve closed
8/27/2011	1:30:48 AM	SiCl4 post valve closed
8/27/2011	1:30:48 AM	Bypass valve closed
8/27/2011	1:30:48 AM	Bubbler valve closed
8/27/2011	1:30:48 AM	Main Vac valve opened
8/27/2011	1:30:48 AM	Helium MFC set to  0.000000
8/27/2011	1:30:48 AM	H2 MFC set to  0.000000
8/27/2011	1:30:48 AM	BCl3 MFC set to  0.000000
8/27/2011	1:30:48 AM	PHl3 MFC set to  0.000000
8/27/2011	1:30:48 AM	SiCl4 MFC set to  0.000000
8/27/2011	1:30:48 AM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:30:48 AM	Tube furnace set to 0
8/27/2011	1:30:49 AM	Run finished at 1:30 AM
8/27/2011	1:30:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2011	12:30:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	12:30:34 PM	Recipe started at 12:30 PM
8/27/2011	12:30:34 PM	Helium valve closed
8/27/2011	12:30:34 PM	H2 valve closed
8/27/2011	12:30:34 PM	BCl3 valve closed
8/27/2011	12:30:34 PM	PH3 valve closed
8/27/2011	12:30:34 PM	SiCl4 pre valve closed
8/27/2011	12:30:34 PM	SiCl4 post valve closed
8/27/2011	12:30:34 PM	Main Vac valve closed
8/27/2011	12:30:34 PM	Bypass valve closed
8/27/2011	12:30:34 PM	Bubbler valve closed
8/27/2011	12:30:34 PM	Helium MFC set to  0.000000
8/27/2011	12:30:34 PM	H2 MFC set to  0.000000
8/27/2011	12:30:34 PM	BCl3 MFC set to  0.000000
8/27/2011	12:30:34 PM	PHl3 MFC set to  0.000000
8/27/2011	12:30:34 PM	SiCl4 MFC set to  0.000000
8/27/2011	12:30:34 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:30:34 PM	Tube furnace set to 0
8/27/2011	12:30:37 PM	H2 valve closed
8/27/2011	12:30:37 PM	BCl3 valve closed
8/27/2011	12:30:37 PM	PH3 valve closed
8/27/2011	12:30:37 PM	SiCl4 pre valve closed
8/27/2011	12:30:37 PM	SiCl4 post valve closed
8/27/2011	12:30:37 PM	Main Vac valve closed
8/27/2011	12:30:37 PM	Bypass valve closed
8/27/2011	12:30:37 PM	Bubbler valve closed
8/27/2011	12:30:37 PM	Helium valve opened
8/27/2011	12:30:37 PM	Helium MFC set to  500.000000
8/27/2011	12:30:37 PM	H2 MFC set to  0.000000
8/27/2011	12:30:37 PM	BCl3 MFC set to  0.000000
8/27/2011	12:30:37 PM	PHl3 MFC set to  0.000000
8/27/2011	12:30:37 PM	SiCl4 MFC set to  0.000000
8/27/2011	12:30:37 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:30:37 PM	Tube furnace set to 0
8/27/2011	12:31:42 PM	Helium valve closed
8/27/2011	12:31:42 PM	H2 valve closed
8/27/2011	12:31:42 PM	BCl3 valve closed
8/27/2011	12:31:42 PM	PH3 valve closed
8/27/2011	12:31:42 PM	SiCl4 pre valve closed
8/27/2011	12:31:42 PM	SiCl4 post valve closed
8/27/2011	12:31:42 PM	Main Vac valve closed
8/27/2011	12:31:42 PM	Bypass valve closed
8/27/2011	12:31:42 PM	Bubbler valve closed
8/27/2011	12:31:42 PM	Helium MFC set to  0.000000
8/27/2011	12:31:42 PM	H2 MFC set to  0.000000
8/27/2011	12:31:42 PM	BCl3 MFC set to  0.000000
8/27/2011	12:31:42 PM	PHl3 MFC set to  0.000000
8/27/2011	12:31:42 PM	SiCl4 MFC set to  0.000000
8/27/2011	12:31:42 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:31:43 PM	Tube furnace set to 0
8/27/2011	12:31:44 PM	Run finished at 12:31 PM
8/27/2011	12:31:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	12:38:32 PM	Recipe started at 12:38 PM
8/27/2011	12:38:32 PM	Helium valve closed
8/27/2011	12:38:32 PM	H2 valve closed
8/27/2011	12:38:32 PM	BCl3 valve closed
8/27/2011	12:38:32 PM	PH3 valve closed
8/27/2011	12:38:32 PM	SiCl4 pre valve closed
8/27/2011	12:38:32 PM	SiCl4 post valve closed
8/27/2011	12:38:32 PM	Main Vac valve closed
8/27/2011	12:38:32 PM	Bubbler valve closed
8/27/2011	12:38:32 PM	Bypass valve opened
8/27/2011	12:38:32 PM	Helium MFC set to  0.000000
8/27/2011	12:38:32 PM	H2 MFC set to  0.000000
8/27/2011	12:38:32 PM	BCl3 MFC set to  0.000000
8/27/2011	12:38:32 PM	PHl3 MFC set to  0.000000
8/27/2011	12:38:32 PM	SiCl4 MFC set to  0.000000
8/27/2011	12:38:32 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:38:32 PM	Tube furnace set to 0
8/27/2011	12:39:50 PM	Helium valve closed
8/27/2011	12:39:50 PM	H2 valve closed
8/27/2011	12:39:50 PM	BCl3 valve closed
8/27/2011	12:39:50 PM	PH3 valve closed
8/27/2011	12:39:50 PM	SiCl4 pre valve closed
8/27/2011	12:39:50 PM	SiCl4 post valve closed
8/27/2011	12:39:50 PM	Main Vac valve closed
8/27/2011	12:39:50 PM	Bubbler valve closed
8/27/2011	12:39:50 PM	Bypass valve opened
8/27/2011	12:39:50 PM	Helium MFC set to  0.000000
8/27/2011	12:39:50 PM	H2 MFC set to  0.000000
8/27/2011	12:39:50 PM	BCl3 MFC set to  0.000000
8/27/2011	12:39:50 PM	PHl3 MFC set to  0.000000
8/27/2011	12:39:50 PM	SiCl4 MFC set to  0.000000
8/27/2011	12:39:50 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:39:50 PM	Tube furnace set to 0
8/27/2011	12:40:21 PM	Helium valve closed
8/27/2011	12:40:21 PM	H2 valve closed
8/27/2011	12:40:21 PM	BCl3 valve closed
8/27/2011	12:40:21 PM	PH3 valve closed
8/27/2011	12:40:21 PM	SiCl4 pre valve closed
8/27/2011	12:40:21 PM	SiCl4 post valve closed
8/27/2011	12:40:21 PM	Bypass valve closed
8/27/2011	12:40:21 PM	Bubbler valve closed
8/27/2011	12:40:21 PM	Main Vac valve opened
8/27/2011	12:40:21 PM	Helium MFC set to  0.000000
8/27/2011	12:40:21 PM	H2 MFC set to  0.000000
8/27/2011	12:40:21 PM	BCl3 MFC set to  0.000000
8/27/2011	12:40:21 PM	PHl3 MFC set to  0.000000
8/27/2011	12:40:21 PM	SiCl4 MFC set to  0.000000
8/27/2011	12:40:21 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	12:40:21 PM	Tube furnace set to 0
8/27/2011	1:10:21 PM	H2 valve closed
8/27/2011	1:10:21 PM	BCl3 valve closed
8/27/2011	1:10:21 PM	PH3 valve closed
8/27/2011	1:10:21 PM	SiCl4 pre valve closed
8/27/2011	1:10:21 PM	SiCl4 post valve closed
8/27/2011	1:10:21 PM	Bypass valve closed
8/27/2011	1:10:21 PM	Bubbler valve closed
8/27/2011	1:10:21 PM	Helium valve opened
8/27/2011	1:10:21 PM	Main Vac valve opened
8/27/2011	1:10:21 PM	Helium MFC set to  20.000000
8/27/2011	1:10:21 PM	H2 MFC set to  0.000000
8/27/2011	1:10:21 PM	BCl3 MFC set to  0.000000
8/27/2011	1:10:21 PM	PHl3 MFC set to  0.000000
8/27/2011	1:10:21 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:10:21 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:10:21 PM	Tube furnace set to 0
8/27/2011	1:10:51 PM	Helium valve closed
8/27/2011	1:10:51 PM	H2 valve closed
8/27/2011	1:10:51 PM	BCl3 valve closed
8/27/2011	1:10:51 PM	PH3 valve closed
8/27/2011	1:10:51 PM	SiCl4 pre valve closed
8/27/2011	1:10:51 PM	SiCl4 post valve closed
8/27/2011	1:10:51 PM	Bypass valve closed
8/27/2011	1:10:51 PM	Bubbler valve closed
8/27/2011	1:10:51 PM	Main Vac valve opened
8/27/2011	1:10:51 PM	Helium MFC set to  0.000000
8/27/2011	1:10:51 PM	H2 MFC set to  0.000000
8/27/2011	1:10:51 PM	BCl3 MFC set to  0.000000
8/27/2011	1:10:51 PM	PHl3 MFC set to  0.000000
8/27/2011	1:10:51 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:10:51 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:10:51 PM	Tube furnace set to 0
8/27/2011	1:11:21 PM	H2 valve closed
8/27/2011	1:11:21 PM	BCl3 valve closed
8/27/2011	1:11:21 PM	PH3 valve closed
8/27/2011	1:11:21 PM	SiCl4 pre valve closed
8/27/2011	1:11:21 PM	SiCl4 post valve closed
8/27/2011	1:11:21 PM	Bypass valve closed
8/27/2011	1:11:21 PM	Bubbler valve closed
8/27/2011	1:11:21 PM	Helium valve opened
8/27/2011	1:11:21 PM	Main Vac valve opened
8/27/2011	1:11:21 PM	Helium MFC set to  20.000000
8/27/2011	1:11:21 PM	H2 MFC set to  0.000000
8/27/2011	1:11:21 PM	BCl3 MFC set to  0.000000
8/27/2011	1:11:21 PM	PHl3 MFC set to  0.000000
8/27/2011	1:11:21 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:11:21 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:11:21 PM	Tube furnace set to 0
8/27/2011	1:11:51 PM	Helium valve closed
8/27/2011	1:11:51 PM	H2 valve closed
8/27/2011	1:11:51 PM	BCl3 valve closed
8/27/2011	1:11:51 PM	PH3 valve closed
8/27/2011	1:11:51 PM	SiCl4 pre valve closed
8/27/2011	1:11:51 PM	SiCl4 post valve closed
8/27/2011	1:11:51 PM	Bypass valve closed
8/27/2011	1:11:51 PM	Bubbler valve closed
8/27/2011	1:11:51 PM	Main Vac valve opened
8/27/2011	1:11:51 PM	Helium MFC set to  0.000000
8/27/2011	1:11:51 PM	H2 MFC set to  0.000000
8/27/2011	1:11:51 PM	BCl3 MFC set to  0.000000
8/27/2011	1:11:51 PM	PHl3 MFC set to  0.000000
8/27/2011	1:11:51 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:11:51 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:11:51 PM	Tube furnace set to 0
8/27/2011	1:12:21 PM	H2 valve closed
8/27/2011	1:12:21 PM	BCl3 valve closed
8/27/2011	1:12:21 PM	PH3 valve closed
8/27/2011	1:12:21 PM	SiCl4 pre valve closed
8/27/2011	1:12:21 PM	SiCl4 post valve closed
8/27/2011	1:12:21 PM	Bypass valve closed
8/27/2011	1:12:21 PM	Bubbler valve closed
8/27/2011	1:12:21 PM	Helium valve opened
8/27/2011	1:12:21 PM	Main Vac valve opened
8/27/2011	1:12:21 PM	Helium MFC set to  20.000000
8/27/2011	1:12:21 PM	H2 MFC set to  0.000000
8/27/2011	1:12:21 PM	BCl3 MFC set to  0.000000
8/27/2011	1:12:21 PM	PHl3 MFC set to  0.000000
8/27/2011	1:12:21 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:12:21 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:12:22 PM	Tube furnace set to 0
8/27/2011	1:12:52 PM	Helium valve closed
8/27/2011	1:12:52 PM	H2 valve closed
8/27/2011	1:12:52 PM	BCl3 valve closed
8/27/2011	1:12:52 PM	PH3 valve closed
8/27/2011	1:12:52 PM	SiCl4 pre valve closed
8/27/2011	1:12:52 PM	SiCl4 post valve closed
8/27/2011	1:12:52 PM	Bypass valve closed
8/27/2011	1:12:52 PM	Bubbler valve closed
8/27/2011	1:12:52 PM	Main Vac valve opened
8/27/2011	1:12:52 PM	Helium MFC set to  0.000000
8/27/2011	1:12:52 PM	H2 MFC set to  0.000000
8/27/2011	1:12:52 PM	BCl3 MFC set to  0.000000
8/27/2011	1:12:52 PM	PHl3 MFC set to  0.000000
8/27/2011	1:12:52 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:12:52 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:12:52 PM	Tube furnace set to 0
8/27/2011	1:13:22 PM	H2 valve closed
8/27/2011	1:13:22 PM	BCl3 valve closed
8/27/2011	1:13:22 PM	PH3 valve closed
8/27/2011	1:13:22 PM	SiCl4 pre valve closed
8/27/2011	1:13:22 PM	SiCl4 post valve closed
8/27/2011	1:13:22 PM	Bypass valve closed
8/27/2011	1:13:22 PM	Bubbler valve closed
8/27/2011	1:13:22 PM	Helium valve opened
8/27/2011	1:13:22 PM	Main Vac valve opened
8/27/2011	1:13:22 PM	Helium MFC set to  20.000000
8/27/2011	1:13:22 PM	H2 MFC set to  0.000000
8/27/2011	1:13:22 PM	BCl3 MFC set to  0.000000
8/27/2011	1:13:22 PM	PHl3 MFC set to  0.000000
8/27/2011	1:13:22 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:13:22 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:13:22 PM	Tube furnace set to 0
8/27/2011	1:13:52 PM	Helium valve closed
8/27/2011	1:13:52 PM	H2 valve closed
8/27/2011	1:13:52 PM	BCl3 valve closed
8/27/2011	1:13:52 PM	PH3 valve closed
8/27/2011	1:13:52 PM	SiCl4 pre valve closed
8/27/2011	1:13:52 PM	SiCl4 post valve closed
8/27/2011	1:13:52 PM	Bypass valve closed
8/27/2011	1:13:52 PM	Bubbler valve closed
8/27/2011	1:13:52 PM	Main Vac valve opened
8/27/2011	1:13:52 PM	Helium MFC set to  0.000000
8/27/2011	1:13:52 PM	H2 MFC set to  0.000000
8/27/2011	1:13:52 PM	BCl3 MFC set to  0.000000
8/27/2011	1:13:52 PM	PHl3 MFC set to  0.000000
8/27/2011	1:13:52 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:13:52 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:13:52 PM	Tube furnace set to 0
8/27/2011	1:14:22 PM	H2 valve closed
8/27/2011	1:14:22 PM	BCl3 valve closed
8/27/2011	1:14:22 PM	PH3 valve closed
8/27/2011	1:14:22 PM	SiCl4 pre valve closed
8/27/2011	1:14:22 PM	SiCl4 post valve closed
8/27/2011	1:14:22 PM	Bypass valve closed
8/27/2011	1:14:22 PM	Bubbler valve closed
8/27/2011	1:14:22 PM	Helium valve opened
8/27/2011	1:14:22 PM	Main Vac valve opened
8/27/2011	1:14:22 PM	Helium MFC set to  20.000000
8/27/2011	1:14:22 PM	H2 MFC set to  0.000000
8/27/2011	1:14:22 PM	BCl3 MFC set to  0.000000
8/27/2011	1:14:22 PM	PHl3 MFC set to  0.000000
8/27/2011	1:14:22 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:14:22 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:14:22 PM	Tube furnace set to 0
8/27/2011	1:14:52 PM	Helium valve closed
8/27/2011	1:14:52 PM	H2 valve closed
8/27/2011	1:14:52 PM	BCl3 valve closed
8/27/2011	1:14:52 PM	PH3 valve closed
8/27/2011	1:14:52 PM	SiCl4 pre valve closed
8/27/2011	1:14:52 PM	SiCl4 post valve closed
8/27/2011	1:14:52 PM	Bypass valve closed
8/27/2011	1:14:52 PM	Bubbler valve closed
8/27/2011	1:14:52 PM	Main Vac valve opened
8/27/2011	1:14:52 PM	Helium MFC set to  0.000000
8/27/2011	1:14:52 PM	H2 MFC set to  0.000000
8/27/2011	1:14:52 PM	BCl3 MFC set to  0.000000
8/27/2011	1:14:52 PM	PHl3 MFC set to  0.000000
8/27/2011	1:14:52 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:14:52 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:14:53 PM	Tube furnace set to 0
8/27/2011	1:15:23 PM	H2 valve closed
8/27/2011	1:15:23 PM	BCl3 valve closed
8/27/2011	1:15:23 PM	PH3 valve closed
8/27/2011	1:15:23 PM	SiCl4 pre valve closed
8/27/2011	1:15:23 PM	SiCl4 post valve closed
8/27/2011	1:15:23 PM	Bypass valve closed
8/27/2011	1:15:23 PM	Bubbler valve closed
8/27/2011	1:15:23 PM	Helium valve opened
8/27/2011	1:15:23 PM	Main Vac valve opened
8/27/2011	1:15:23 PM	Helium MFC set to  20.000000
8/27/2011	1:15:23 PM	H2 MFC set to  0.000000
8/27/2011	1:15:23 PM	BCl3 MFC set to  0.000000
8/27/2011	1:15:23 PM	PHl3 MFC set to  0.000000
8/27/2011	1:15:23 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:15:23 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:15:23 PM	Tube furnace set to 0
8/27/2011	1:15:53 PM	Helium valve closed
8/27/2011	1:15:53 PM	H2 valve closed
8/27/2011	1:15:53 PM	BCl3 valve closed
8/27/2011	1:15:53 PM	PH3 valve closed
8/27/2011	1:15:53 PM	SiCl4 pre valve closed
8/27/2011	1:15:53 PM	SiCl4 post valve closed
8/27/2011	1:15:53 PM	Bypass valve closed
8/27/2011	1:15:53 PM	Bubbler valve closed
8/27/2011	1:15:53 PM	Main Vac valve opened
8/27/2011	1:15:53 PM	Helium MFC set to  0.000000
8/27/2011	1:15:53 PM	H2 MFC set to  0.000000
8/27/2011	1:15:53 PM	BCl3 MFC set to  0.000000
8/27/2011	1:15:53 PM	PHl3 MFC set to  0.000000
8/27/2011	1:15:53 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:15:53 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:15:53 PM	Tube furnace set to 0
8/27/2011	1:16:23 PM	H2 valve closed
8/27/2011	1:16:23 PM	BCl3 valve closed
8/27/2011	1:16:23 PM	PH3 valve closed
8/27/2011	1:16:23 PM	SiCl4 pre valve closed
8/27/2011	1:16:23 PM	SiCl4 post valve closed
8/27/2011	1:16:23 PM	Bypass valve closed
8/27/2011	1:16:23 PM	Bubbler valve closed
8/27/2011	1:16:23 PM	Helium valve opened
8/27/2011	1:16:23 PM	Main Vac valve opened
8/27/2011	1:16:23 PM	Helium MFC set to  20.000000
8/27/2011	1:16:23 PM	H2 MFC set to  0.000000
8/27/2011	1:16:23 PM	BCl3 MFC set to  0.000000
8/27/2011	1:16:23 PM	PHl3 MFC set to  0.000000
8/27/2011	1:16:23 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:16:23 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:16:23 PM	Tube furnace set to 0
8/27/2011	1:16:53 PM	Helium valve closed
8/27/2011	1:16:53 PM	H2 valve closed
8/27/2011	1:16:53 PM	BCl3 valve closed
8/27/2011	1:16:53 PM	PH3 valve closed
8/27/2011	1:16:53 PM	SiCl4 pre valve closed
8/27/2011	1:16:53 PM	SiCl4 post valve closed
8/27/2011	1:16:53 PM	Bypass valve closed
8/27/2011	1:16:53 PM	Bubbler valve closed
8/27/2011	1:16:53 PM	Main Vac valve opened
8/27/2011	1:16:53 PM	Helium MFC set to  0.000000
8/27/2011	1:16:53 PM	H2 MFC set to  0.000000
8/27/2011	1:16:53 PM	BCl3 MFC set to  0.000000
8/27/2011	1:16:53 PM	PHl3 MFC set to  0.000000
8/27/2011	1:16:53 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:16:53 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:16:53 PM	Tube furnace set to 0
8/27/2011	1:17:23 PM	H2 valve closed
8/27/2011	1:17:23 PM	BCl3 valve closed
8/27/2011	1:17:23 PM	PH3 valve closed
8/27/2011	1:17:23 PM	SiCl4 pre valve closed
8/27/2011	1:17:23 PM	SiCl4 post valve closed
8/27/2011	1:17:23 PM	Bypass valve closed
8/27/2011	1:17:23 PM	Bubbler valve closed
8/27/2011	1:17:23 PM	Helium valve opened
8/27/2011	1:17:23 PM	Main Vac valve opened
8/27/2011	1:17:23 PM	Helium MFC set to  20.000000
8/27/2011	1:17:23 PM	H2 MFC set to  0.000000
8/27/2011	1:17:23 PM	BCl3 MFC set to  0.000000
8/27/2011	1:17:23 PM	PHl3 MFC set to  0.000000
8/27/2011	1:17:23 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:17:23 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:17:24 PM	Tube furnace set to 0
8/27/2011	1:17:54 PM	Helium valve closed
8/27/2011	1:17:54 PM	H2 valve closed
8/27/2011	1:17:54 PM	BCl3 valve closed
8/27/2011	1:17:54 PM	PH3 valve closed
8/27/2011	1:17:54 PM	SiCl4 pre valve closed
8/27/2011	1:17:54 PM	SiCl4 post valve closed
8/27/2011	1:17:54 PM	Bypass valve closed
8/27/2011	1:17:54 PM	Bubbler valve closed
8/27/2011	1:17:54 PM	Main Vac valve opened
8/27/2011	1:17:54 PM	Helium MFC set to  0.000000
8/27/2011	1:17:54 PM	H2 MFC set to  0.000000
8/27/2011	1:17:54 PM	BCl3 MFC set to  0.000000
8/27/2011	1:17:54 PM	PHl3 MFC set to  0.000000
8/27/2011	1:17:54 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:17:54 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:17:54 PM	Tube furnace set to 0
8/27/2011	1:18:24 PM	H2 valve closed
8/27/2011	1:18:24 PM	BCl3 valve closed
8/27/2011	1:18:24 PM	PH3 valve closed
8/27/2011	1:18:24 PM	SiCl4 pre valve closed
8/27/2011	1:18:24 PM	SiCl4 post valve closed
8/27/2011	1:18:24 PM	Bypass valve closed
8/27/2011	1:18:24 PM	Bubbler valve closed
8/27/2011	1:18:24 PM	Helium valve opened
8/27/2011	1:18:24 PM	Main Vac valve opened
8/27/2011	1:18:24 PM	Helium MFC set to  20.000000
8/27/2011	1:18:24 PM	H2 MFC set to  0.000000
8/27/2011	1:18:24 PM	BCl3 MFC set to  0.000000
8/27/2011	1:18:24 PM	PHl3 MFC set to  0.000000
8/27/2011	1:18:24 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:18:24 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:18:24 PM	Tube furnace set to 0
8/27/2011	1:18:54 PM	Helium valve closed
8/27/2011	1:18:54 PM	H2 valve closed
8/27/2011	1:18:54 PM	BCl3 valve closed
8/27/2011	1:18:54 PM	PH3 valve closed
8/27/2011	1:18:54 PM	SiCl4 pre valve closed
8/27/2011	1:18:54 PM	SiCl4 post valve closed
8/27/2011	1:18:54 PM	Bypass valve closed
8/27/2011	1:18:54 PM	Bubbler valve closed
8/27/2011	1:18:54 PM	Main Vac valve opened
8/27/2011	1:18:54 PM	Helium MFC set to  0.000000
8/27/2011	1:18:54 PM	H2 MFC set to  0.000000
8/27/2011	1:18:54 PM	BCl3 MFC set to  0.000000
8/27/2011	1:18:54 PM	PHl3 MFC set to  0.000000
8/27/2011	1:18:54 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:18:54 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:18:54 PM	Tube furnace set to 0
8/27/2011	1:19:24 PM	H2 valve closed
8/27/2011	1:19:24 PM	BCl3 valve closed
8/27/2011	1:19:24 PM	PH3 valve closed
8/27/2011	1:19:24 PM	SiCl4 pre valve closed
8/27/2011	1:19:24 PM	SiCl4 post valve closed
8/27/2011	1:19:24 PM	Bypass valve closed
8/27/2011	1:19:24 PM	Bubbler valve closed
8/27/2011	1:19:24 PM	Helium valve opened
8/27/2011	1:19:24 PM	Main Vac valve opened
8/27/2011	1:19:24 PM	Helium MFC set to  20.000000
8/27/2011	1:19:24 PM	H2 MFC set to  0.000000
8/27/2011	1:19:24 PM	BCl3 MFC set to  0.000000
8/27/2011	1:19:24 PM	PHl3 MFC set to  0.000000
8/27/2011	1:19:24 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:19:24 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:19:24 PM	Tube furnace set to 0
8/27/2011	1:19:54 PM	Helium valve closed
8/27/2011	1:19:54 PM	H2 valve closed
8/27/2011	1:19:54 PM	BCl3 valve closed
8/27/2011	1:19:54 PM	PH3 valve closed
8/27/2011	1:19:54 PM	SiCl4 pre valve closed
8/27/2011	1:19:54 PM	SiCl4 post valve closed
8/27/2011	1:19:54 PM	Bypass valve closed
8/27/2011	1:19:54 PM	Bubbler valve closed
8/27/2011	1:19:54 PM	Main Vac valve opened
8/27/2011	1:19:54 PM	Helium MFC set to  0.000000
8/27/2011	1:19:54 PM	H2 MFC set to  0.000000
8/27/2011	1:19:54 PM	BCl3 MFC set to  0.000000
8/27/2011	1:19:54 PM	PHl3 MFC set to  0.000000
8/27/2011	1:19:54 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:19:54 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:19:55 PM	Tube furnace set to 0
8/27/2011	1:19:56 PM	Run finished at 1:19 PM
8/27/2011	1:52:47 PM	Recipe started at 1:52 PM
8/27/2011	1:52:47 PM	Helium valve closed
8/27/2011	1:52:47 PM	H2 valve closed
8/27/2011	1:52:47 PM	BCl3 valve closed
8/27/2011	1:52:47 PM	PH3 valve closed
8/27/2011	1:52:47 PM	SiCl4 pre valve closed
8/27/2011	1:52:47 PM	SiCl4 post valve closed
8/27/2011	1:52:47 PM	Bypass valve closed
8/27/2011	1:52:47 PM	Bubbler valve closed
8/27/2011	1:52:47 PM	Main Vac valve opened
8/27/2011	1:52:47 PM	Helium MFC set to  0.000000
8/27/2011	1:52:47 PM	H2 MFC set to  0.000000
8/27/2011	1:52:47 PM	BCl3 MFC set to  0.000000
8/27/2011	1:52:47 PM	PHl3 MFC set to  0.000000
8/27/2011	1:52:47 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:52:47 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:52:47 PM	Tube furnace set to 0
8/27/2011	1:53:17 PM	H2 valve closed
8/27/2011	1:53:17 PM	BCl3 valve closed
8/27/2011	1:53:17 PM	PH3 valve closed
8/27/2011	1:53:17 PM	SiCl4 pre valve closed
8/27/2011	1:53:17 PM	SiCl4 post valve closed
8/27/2011	1:53:17 PM	Bypass valve closed
8/27/2011	1:53:17 PM	Bubbler valve closed
8/27/2011	1:53:17 PM	Helium valve opened
8/27/2011	1:53:17 PM	Main Vac valve opened
8/27/2011	1:53:17 PM	Helium MFC set to  20.000000
8/27/2011	1:53:17 PM	H2 MFC set to  0.000000
8/27/2011	1:53:17 PM	BCl3 MFC set to  0.000000
8/27/2011	1:53:17 PM	PHl3 MFC set to  0.000000
8/27/2011	1:53:17 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:53:17 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:53:17 PM	Tube furnace set to 0
8/27/2011	1:53:47 PM	Helium valve closed
8/27/2011	1:53:47 PM	H2 valve closed
8/27/2011	1:53:47 PM	BCl3 valve closed
8/27/2011	1:53:47 PM	PH3 valve closed
8/27/2011	1:53:47 PM	SiCl4 pre valve closed
8/27/2011	1:53:47 PM	SiCl4 post valve closed
8/27/2011	1:53:47 PM	Bypass valve closed
8/27/2011	1:53:47 PM	Bubbler valve closed
8/27/2011	1:53:47 PM	Main Vac valve opened
8/27/2011	1:53:47 PM	Helium MFC set to  0.000000
8/27/2011	1:53:47 PM	H2 MFC set to  0.000000
8/27/2011	1:53:47 PM	BCl3 MFC set to  0.000000
8/27/2011	1:53:47 PM	PHl3 MFC set to  0.000000
8/27/2011	1:53:47 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:53:47 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:53:48 PM	Tube furnace set to 0
8/27/2011	1:54:18 PM	H2 valve closed
8/27/2011	1:54:18 PM	BCl3 valve closed
8/27/2011	1:54:18 PM	PH3 valve closed
8/27/2011	1:54:18 PM	SiCl4 pre valve closed
8/27/2011	1:54:18 PM	SiCl4 post valve closed
8/27/2011	1:54:18 PM	Bypass valve closed
8/27/2011	1:54:18 PM	Bubbler valve closed
8/27/2011	1:54:18 PM	Helium valve opened
8/27/2011	1:54:18 PM	Main Vac valve opened
8/27/2011	1:54:18 PM	Helium MFC set to  20.000000
8/27/2011	1:54:18 PM	H2 MFC set to  0.000000
8/27/2011	1:54:18 PM	BCl3 MFC set to  0.000000
8/27/2011	1:54:18 PM	PHl3 MFC set to  0.000000
8/27/2011	1:54:18 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:54:18 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:54:18 PM	Tube furnace set to 0
8/27/2011	1:54:48 PM	Helium valve closed
8/27/2011	1:54:48 PM	H2 valve closed
8/27/2011	1:54:48 PM	BCl3 valve closed
8/27/2011	1:54:48 PM	PH3 valve closed
8/27/2011	1:54:48 PM	SiCl4 pre valve closed
8/27/2011	1:54:48 PM	SiCl4 post valve closed
8/27/2011	1:54:48 PM	Bypass valve closed
8/27/2011	1:54:48 PM	Bubbler valve closed
8/27/2011	1:54:48 PM	Main Vac valve opened
8/27/2011	1:54:48 PM	Helium MFC set to  0.000000
8/27/2011	1:54:48 PM	H2 MFC set to  0.000000
8/27/2011	1:54:48 PM	BCl3 MFC set to  0.000000
8/27/2011	1:54:48 PM	PHl3 MFC set to  0.000000
8/27/2011	1:54:48 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:54:48 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:54:48 PM	Tube furnace set to 0
8/27/2011	1:55:18 PM	H2 valve closed
8/27/2011	1:55:18 PM	BCl3 valve closed
8/27/2011	1:55:18 PM	PH3 valve closed
8/27/2011	1:55:18 PM	SiCl4 pre valve closed
8/27/2011	1:55:18 PM	SiCl4 post valve closed
8/27/2011	1:55:18 PM	Bypass valve closed
8/27/2011	1:55:18 PM	Bubbler valve closed
8/27/2011	1:55:18 PM	Helium valve opened
8/27/2011	1:55:18 PM	Main Vac valve opened
8/27/2011	1:55:18 PM	Helium MFC set to  20.000000
8/27/2011	1:55:18 PM	H2 MFC set to  0.000000
8/27/2011	1:55:18 PM	BCl3 MFC set to  0.000000
8/27/2011	1:55:18 PM	PHl3 MFC set to  0.000000
8/27/2011	1:55:18 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:55:18 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:55:18 PM	Tube furnace set to 0
8/27/2011	1:55:48 PM	Helium valve closed
8/27/2011	1:55:48 PM	H2 valve closed
8/27/2011	1:55:48 PM	BCl3 valve closed
8/27/2011	1:55:48 PM	PH3 valve closed
8/27/2011	1:55:48 PM	SiCl4 pre valve closed
8/27/2011	1:55:48 PM	SiCl4 post valve closed
8/27/2011	1:55:48 PM	Bypass valve closed
8/27/2011	1:55:48 PM	Bubbler valve closed
8/27/2011	1:55:48 PM	Main Vac valve opened
8/27/2011	1:55:48 PM	Helium MFC set to  0.000000
8/27/2011	1:55:48 PM	H2 MFC set to  0.000000
8/27/2011	1:55:48 PM	BCl3 MFC set to  0.000000
8/27/2011	1:55:48 PM	PHl3 MFC set to  0.000000
8/27/2011	1:55:48 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:55:48 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:55:48 PM	Tube furnace set to 0
8/27/2011	1:56:18 PM	H2 valve closed
8/27/2011	1:56:18 PM	BCl3 valve closed
8/27/2011	1:56:18 PM	PH3 valve closed
8/27/2011	1:56:18 PM	SiCl4 pre valve closed
8/27/2011	1:56:18 PM	SiCl4 post valve closed
8/27/2011	1:56:18 PM	Bypass valve closed
8/27/2011	1:56:18 PM	Bubbler valve closed
8/27/2011	1:56:18 PM	Helium valve opened
8/27/2011	1:56:18 PM	Main Vac valve opened
8/27/2011	1:56:18 PM	Helium MFC set to  20.000000
8/27/2011	1:56:18 PM	H2 MFC set to  0.000000
8/27/2011	1:56:18 PM	BCl3 MFC set to  0.000000
8/27/2011	1:56:18 PM	PHl3 MFC set to  0.000000
8/27/2011	1:56:18 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:56:18 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:56:19 PM	Tube furnace set to 0
8/27/2011	1:56:49 PM	Helium valve closed
8/27/2011	1:56:49 PM	H2 valve closed
8/27/2011	1:56:49 PM	BCl3 valve closed
8/27/2011	1:56:49 PM	PH3 valve closed
8/27/2011	1:56:49 PM	SiCl4 pre valve closed
8/27/2011	1:56:49 PM	SiCl4 post valve closed
8/27/2011	1:56:49 PM	Bypass valve closed
8/27/2011	1:56:49 PM	Bubbler valve closed
8/27/2011	1:56:49 PM	Main Vac valve opened
8/27/2011	1:56:49 PM	Helium MFC set to  0.000000
8/27/2011	1:56:49 PM	H2 MFC set to  0.000000
8/27/2011	1:56:49 PM	BCl3 MFC set to  0.000000
8/27/2011	1:56:49 PM	PHl3 MFC set to  0.000000
8/27/2011	1:56:49 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:56:49 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:56:49 PM	Tube furnace set to 0
8/27/2011	1:57:19 PM	H2 valve closed
8/27/2011	1:57:19 PM	BCl3 valve closed
8/27/2011	1:57:19 PM	PH3 valve closed
8/27/2011	1:57:19 PM	SiCl4 pre valve closed
8/27/2011	1:57:19 PM	SiCl4 post valve closed
8/27/2011	1:57:19 PM	Bypass valve closed
8/27/2011	1:57:19 PM	Bubbler valve closed
8/27/2011	1:57:19 PM	Helium valve opened
8/27/2011	1:57:19 PM	Main Vac valve opened
8/27/2011	1:57:19 PM	Helium MFC set to  20.000000
8/27/2011	1:57:19 PM	H2 MFC set to  0.000000
8/27/2011	1:57:19 PM	BCl3 MFC set to  0.000000
8/27/2011	1:57:19 PM	PHl3 MFC set to  0.000000
8/27/2011	1:57:19 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:57:19 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:57:19 PM	Tube furnace set to 0
8/27/2011	1:57:49 PM	Helium valve closed
8/27/2011	1:57:49 PM	H2 valve closed
8/27/2011	1:57:49 PM	BCl3 valve closed
8/27/2011	1:57:49 PM	PH3 valve closed
8/27/2011	1:57:49 PM	SiCl4 pre valve closed
8/27/2011	1:57:49 PM	SiCl4 post valve closed
8/27/2011	1:57:49 PM	Bypass valve closed
8/27/2011	1:57:49 PM	Bubbler valve closed
8/27/2011	1:57:49 PM	Main Vac valve opened
8/27/2011	1:57:49 PM	Helium MFC set to  0.000000
8/27/2011	1:57:49 PM	H2 MFC set to  0.000000
8/27/2011	1:57:49 PM	BCl3 MFC set to  0.000000
8/27/2011	1:57:49 PM	PHl3 MFC set to  0.000000
8/27/2011	1:57:49 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:57:49 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:57:49 PM	Tube furnace set to 0
8/27/2011	1:58:19 PM	H2 valve closed
8/27/2011	1:58:19 PM	BCl3 valve closed
8/27/2011	1:58:19 PM	PH3 valve closed
8/27/2011	1:58:19 PM	SiCl4 pre valve closed
8/27/2011	1:58:19 PM	SiCl4 post valve closed
8/27/2011	1:58:19 PM	Bypass valve closed
8/27/2011	1:58:19 PM	Bubbler valve closed
8/27/2011	1:58:19 PM	Helium valve opened
8/27/2011	1:58:19 PM	Main Vac valve opened
8/27/2011	1:58:19 PM	Helium MFC set to  20.000000
8/27/2011	1:58:19 PM	H2 MFC set to  0.000000
8/27/2011	1:58:19 PM	BCl3 MFC set to  0.000000
8/27/2011	1:58:19 PM	PHl3 MFC set to  0.000000
8/27/2011	1:58:19 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:58:19 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:58:19 PM	Tube furnace set to 0
8/27/2011	1:58:49 PM	Helium valve closed
8/27/2011	1:58:49 PM	H2 valve closed
8/27/2011	1:58:49 PM	BCl3 valve closed
8/27/2011	1:58:49 PM	PH3 valve closed
8/27/2011	1:58:49 PM	SiCl4 pre valve closed
8/27/2011	1:58:49 PM	SiCl4 post valve closed
8/27/2011	1:58:49 PM	Bypass valve closed
8/27/2011	1:58:49 PM	Bubbler valve closed
8/27/2011	1:58:49 PM	Main Vac valve opened
8/27/2011	1:58:49 PM	Helium MFC set to  0.000000
8/27/2011	1:58:49 PM	H2 MFC set to  0.000000
8/27/2011	1:58:49 PM	BCl3 MFC set to  0.000000
8/27/2011	1:58:49 PM	PHl3 MFC set to  0.000000
8/27/2011	1:58:49 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:58:49 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:58:50 PM	Tube furnace set to 0
8/27/2011	1:59:20 PM	H2 valve closed
8/27/2011	1:59:20 PM	BCl3 valve closed
8/27/2011	1:59:20 PM	PH3 valve closed
8/27/2011	1:59:20 PM	SiCl4 pre valve closed
8/27/2011	1:59:20 PM	SiCl4 post valve closed
8/27/2011	1:59:20 PM	Bypass valve closed
8/27/2011	1:59:20 PM	Bubbler valve closed
8/27/2011	1:59:20 PM	Helium valve opened
8/27/2011	1:59:20 PM	Main Vac valve opened
8/27/2011	1:59:20 PM	Helium MFC set to  20.000000
8/27/2011	1:59:20 PM	H2 MFC set to  0.000000
8/27/2011	1:59:20 PM	BCl3 MFC set to  0.000000
8/27/2011	1:59:20 PM	PHl3 MFC set to  0.000000
8/27/2011	1:59:20 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:59:20 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:59:20 PM	Tube furnace set to 0
8/27/2011	1:59:50 PM	Helium valve closed
8/27/2011	1:59:50 PM	H2 valve closed
8/27/2011	1:59:50 PM	BCl3 valve closed
8/27/2011	1:59:50 PM	PH3 valve closed
8/27/2011	1:59:50 PM	SiCl4 pre valve closed
8/27/2011	1:59:50 PM	SiCl4 post valve closed
8/27/2011	1:59:50 PM	Bypass valve closed
8/27/2011	1:59:50 PM	Bubbler valve closed
8/27/2011	1:59:50 PM	Main Vac valve opened
8/27/2011	1:59:50 PM	Helium MFC set to  0.000000
8/27/2011	1:59:50 PM	H2 MFC set to  0.000000
8/27/2011	1:59:50 PM	BCl3 MFC set to  0.000000
8/27/2011	1:59:50 PM	PHl3 MFC set to  0.000000
8/27/2011	1:59:50 PM	SiCl4 MFC set to  0.000000
8/27/2011	1:59:50 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	1:59:50 PM	Tube furnace set to 0
8/27/2011	2:00:20 PM	H2 valve closed
8/27/2011	2:00:20 PM	BCl3 valve closed
8/27/2011	2:00:20 PM	PH3 valve closed
8/27/2011	2:00:20 PM	SiCl4 pre valve closed
8/27/2011	2:00:20 PM	SiCl4 post valve closed
8/27/2011	2:00:20 PM	Bypass valve closed
8/27/2011	2:00:20 PM	Bubbler valve closed
8/27/2011	2:00:20 PM	Helium valve opened
8/27/2011	2:00:20 PM	Main Vac valve opened
8/27/2011	2:00:20 PM	Helium MFC set to  20.000000
8/27/2011	2:00:20 PM	H2 MFC set to  0.000000
8/27/2011	2:00:20 PM	BCl3 MFC set to  0.000000
8/27/2011	2:00:20 PM	PHl3 MFC set to  0.000000
8/27/2011	2:00:20 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:00:20 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:00:20 PM	Tube furnace set to 0
8/27/2011	2:00:50 PM	Helium valve closed
8/27/2011	2:00:50 PM	H2 valve closed
8/27/2011	2:00:50 PM	BCl3 valve closed
8/27/2011	2:00:50 PM	PH3 valve closed
8/27/2011	2:00:50 PM	SiCl4 pre valve closed
8/27/2011	2:00:50 PM	SiCl4 post valve closed
8/27/2011	2:00:50 PM	Bypass valve closed
8/27/2011	2:00:50 PM	Bubbler valve closed
8/27/2011	2:00:50 PM	Main Vac valve opened
8/27/2011	2:00:50 PM	Helium MFC set to  0.000000
8/27/2011	2:00:50 PM	H2 MFC set to  0.000000
8/27/2011	2:00:50 PM	BCl3 MFC set to  0.000000
8/27/2011	2:00:50 PM	PHl3 MFC set to  0.000000
8/27/2011	2:00:50 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:00:50 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:00:50 PM	Tube furnace set to 0
8/27/2011	2:01:20 PM	H2 valve closed
8/27/2011	2:01:20 PM	BCl3 valve closed
8/27/2011	2:01:20 PM	PH3 valve closed
8/27/2011	2:01:20 PM	SiCl4 pre valve closed
8/27/2011	2:01:20 PM	SiCl4 post valve closed
8/27/2011	2:01:20 PM	Bypass valve closed
8/27/2011	2:01:20 PM	Bubbler valve closed
8/27/2011	2:01:20 PM	Helium valve opened
8/27/2011	2:01:20 PM	Main Vac valve opened
8/27/2011	2:01:20 PM	Helium MFC set to  20.000000
8/27/2011	2:01:20 PM	H2 MFC set to  0.000000
8/27/2011	2:01:20 PM	BCl3 MFC set to  0.000000
8/27/2011	2:01:20 PM	PHl3 MFC set to  0.000000
8/27/2011	2:01:20 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:01:20 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:01:21 PM	Tube furnace set to 0
8/27/2011	2:01:51 PM	Helium valve closed
8/27/2011	2:01:51 PM	H2 valve closed
8/27/2011	2:01:51 PM	BCl3 valve closed
8/27/2011	2:01:51 PM	PH3 valve closed
8/27/2011	2:01:51 PM	SiCl4 pre valve closed
8/27/2011	2:01:51 PM	SiCl4 post valve closed
8/27/2011	2:01:51 PM	Bypass valve closed
8/27/2011	2:01:51 PM	Bubbler valve closed
8/27/2011	2:01:51 PM	Main Vac valve opened
8/27/2011	2:01:51 PM	Helium MFC set to  0.000000
8/27/2011	2:01:51 PM	H2 MFC set to  0.000000
8/27/2011	2:01:51 PM	BCl3 MFC set to  0.000000
8/27/2011	2:01:51 PM	PHl3 MFC set to  0.000000
8/27/2011	2:01:51 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:01:51 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:01:51 PM	Tube furnace set to 0
8/27/2011	2:02:21 PM	H2 valve closed
8/27/2011	2:02:21 PM	BCl3 valve closed
8/27/2011	2:02:21 PM	PH3 valve closed
8/27/2011	2:02:21 PM	SiCl4 pre valve closed
8/27/2011	2:02:21 PM	SiCl4 post valve closed
8/27/2011	2:02:21 PM	Bypass valve closed
8/27/2011	2:02:21 PM	Bubbler valve closed
8/27/2011	2:02:21 PM	Helium valve opened
8/27/2011	2:02:21 PM	Main Vac valve opened
8/27/2011	2:02:21 PM	Helium MFC set to  20.000000
8/27/2011	2:02:21 PM	H2 MFC set to  0.000000
8/27/2011	2:02:21 PM	BCl3 MFC set to  0.000000
8/27/2011	2:02:21 PM	PHl3 MFC set to  0.000000
8/27/2011	2:02:21 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:02:21 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:02:21 PM	Tube furnace set to 0
8/27/2011	2:02:51 PM	Helium valve closed
8/27/2011	2:02:51 PM	H2 valve closed
8/27/2011	2:02:51 PM	BCl3 valve closed
8/27/2011	2:02:51 PM	PH3 valve closed
8/27/2011	2:02:51 PM	SiCl4 pre valve closed
8/27/2011	2:02:51 PM	SiCl4 post valve closed
8/27/2011	2:02:51 PM	Bypass valve closed
8/27/2011	2:02:51 PM	Bubbler valve closed
8/27/2011	2:02:51 PM	Main Vac valve opened
8/27/2011	2:02:51 PM	Helium MFC set to  0.000000
8/27/2011	2:02:51 PM	H2 MFC set to  0.000000
8/27/2011	2:02:51 PM	BCl3 MFC set to  0.000000
8/27/2011	2:02:51 PM	PHl3 MFC set to  0.000000
8/27/2011	2:02:51 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:02:51 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:02:51 PM	Tube furnace set to 0
8/27/2011	2:02:52 PM	Run finished at 2:02 PM
8/27/2011	2:31:15 PM	Main Vac valve closed
8/27/2011	2:31:27 PM	Main Vac valve opened
8/27/2011	2:33:20 PM	Recipe started at 2:33 PM
8/27/2011	2:33:20 PM	Helium valve closed
8/27/2011	2:33:20 PM	H2 valve closed
8/27/2011	2:33:20 PM	BCl3 valve closed
8/27/2011	2:33:20 PM	PH3 valve closed
8/27/2011	2:33:20 PM	SiCl4 pre valve closed
8/27/2011	2:33:20 PM	SiCl4 post valve closed
8/27/2011	2:33:20 PM	Main Vac valve closed
8/27/2011	2:33:20 PM	Bypass valve closed
8/27/2011	2:33:20 PM	Bubbler valve closed
8/27/2011	2:33:20 PM	Helium MFC set to  0.000000
8/27/2011	2:33:20 PM	H2 MFC set to  0.000000
8/27/2011	2:33:20 PM	BCl3 MFC set to  0.000000
8/27/2011	2:33:20 PM	PHl3 MFC set to  0.000000
8/27/2011	2:33:20 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:33:20 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:33:20 PM	Tube furnace set to 0
8/27/2011	2:33:23 PM	Helium valve closed
8/27/2011	2:33:23 PM	BCl3 valve closed
8/27/2011	2:33:23 PM	PH3 valve closed
8/27/2011	2:33:23 PM	SiCl4 pre valve closed
8/27/2011	2:33:23 PM	SiCl4 post valve closed
8/27/2011	2:33:23 PM	Main Vac valve closed
8/27/2011	2:33:23 PM	Bypass valve closed
8/27/2011	2:33:23 PM	Bubbler valve closed
8/27/2011	2:33:23 PM	H2 valve opened
8/27/2011	2:33:23 PM	Helium MFC set to  0.000000
8/27/2011	2:33:23 PM	H2 MFC set to  500.000000
8/27/2011	2:33:23 PM	BCl3 MFC set to  0.000000
8/27/2011	2:33:23 PM	PHl3 MFC set to  0.000000
8/27/2011	2:33:23 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:33:23 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:33:23 PM	Tube furnace set to 0
8/27/2011	2:34:30 PM	Helium valve closed
8/27/2011	2:34:30 PM	BCl3 valve closed
8/27/2011	2:34:30 PM	PH3 valve closed
8/27/2011	2:34:30 PM	SiCl4 pre valve closed
8/27/2011	2:34:30 PM	SiCl4 post valve closed
8/27/2011	2:34:30 PM	Main Vac valve closed
8/27/2011	2:34:30 PM	Bypass valve closed
8/27/2011	2:34:30 PM	H2 valve opened
8/27/2011	2:34:30 PM	Bubbler valve opened
8/27/2011	2:34:30 PM	Helium MFC set to  0.000000
8/27/2011	2:34:30 PM	H2 MFC set to  500.000000
8/27/2011	2:34:30 PM	BCl3 MFC set to  0.000000
8/27/2011	2:34:30 PM	PHl3 MFC set to  0.000000
8/27/2011	2:34:30 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:34:30 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:34:30 PM	Tube furnace set to 0
8/27/2011	2:34:31 PM	Helium valve closed
8/27/2011	2:34:31 PM	BCl3 valve closed
8/27/2011	2:34:31 PM	PH3 valve closed
8/27/2011	2:34:31 PM	SiCl4 pre valve closed
8/27/2011	2:34:31 PM	SiCl4 post valve closed
8/27/2011	2:34:31 PM	Main Vac valve closed
8/27/2011	2:34:31 PM	Bypass valve closed
8/27/2011	2:34:31 PM	H2 valve opened
8/27/2011	2:34:31 PM	Bubbler valve opened
8/27/2011	2:34:31 PM	Helium MFC set to  0.000000
8/27/2011	2:34:31 PM	H2 MFC set to  500.000000
8/27/2011	2:34:31 PM	BCl3 MFC set to  0.000000
8/27/2011	2:34:31 PM	PHl3 MFC set to  0.000000
8/27/2011	2:34:31 PM	SiCl4 MFC set to  0.000000
8/27/2011	2:34:31 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:34:31 PM	Tube furnace set to 1000
8/27/2011	2:54:31 PM	Helium valve closed
8/27/2011	2:54:31 PM	PH3 valve closed
8/27/2011	2:54:31 PM	Main Vac valve closed
8/27/2011	2:54:31 PM	Bypass valve closed
8/27/2011	2:54:31 PM	H2 valve opened
8/27/2011	2:54:31 PM	BCl3 valve opened
8/27/2011	2:54:31 PM	SiCl4 pre valve opened
8/27/2011	2:54:31 PM	SiCl4 post valve opened
8/27/2011	2:54:31 PM	Bubbler valve opened
8/27/2011	2:54:31 PM	Helium MFC set to  0.000000
8/27/2011	2:54:31 PM	H2 MFC set to  500.000000
8/27/2011	2:54:31 PM	BCl3 MFC set to  2.500000
8/27/2011	2:54:31 PM	PHl3 MFC set to  0.000000
8/27/2011	2:54:31 PM	SiCl4 MFC set to  50.000000
8/27/2011	2:54:31 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	2:54:32 PM	Tube furnace set to 1000
8/27/2011	3:09:02 PM	Helium valve closed
8/27/2011	3:09:02 PM	BCl3 valve closed
8/27/2011	3:09:02 PM	PH3 valve closed
8/27/2011	3:09:02 PM	SiCl4 pre valve closed
8/27/2011	3:09:02 PM	SiCl4 post valve closed
8/27/2011	3:09:02 PM	Main Vac valve closed
8/27/2011	3:09:02 PM	Bypass valve closed
8/27/2011	3:09:02 PM	H2 valve opened
8/27/2011	3:09:02 PM	Bubbler valve opened
8/27/2011	3:09:02 PM	Helium MFC set to  0.000000
8/27/2011	3:09:02 PM	H2 MFC set to  500.000000
8/27/2011	3:09:02 PM	BCl3 MFC set to  0.000000
8/27/2011	3:09:02 PM	PHl3 MFC set to  0.000000
8/27/2011	3:09:02 PM	SiCl4 MFC set to  0.000000
8/27/2011	3:09:02 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	3:09:02 PM	Tube furnace set to 750
8/27/2011	3:14:02 PM	H2 valve closed
8/27/2011	3:14:02 PM	BCl3 valve closed
8/27/2011	3:14:02 PM	PH3 valve closed
8/27/2011	3:14:02 PM	SiCl4 pre valve closed
8/27/2011	3:14:02 PM	SiCl4 post valve closed
8/27/2011	3:14:02 PM	Main Vac valve closed
8/27/2011	3:14:02 PM	Bypass valve closed
8/27/2011	3:14:02 PM	Helium valve opened
8/27/2011	3:14:02 PM	Bubbler valve opened
8/27/2011	3:14:02 PM	Helium MFC set to  500.000000
8/27/2011	3:14:02 PM	H2 MFC set to  0.000000
8/27/2011	3:14:02 PM	BCl3 MFC set to  0.000000
8/27/2011	3:14:02 PM	PHl3 MFC set to  0.000000
8/27/2011	3:14:02 PM	SiCl4 MFC set to  0.000000
8/27/2011	3:14:02 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	3:14:02 PM	Tube furnace set to 0
8/27/2011	3:34:02 PM	Helium valve closed
8/27/2011	3:34:02 PM	H2 valve closed
8/27/2011	3:34:02 PM	BCl3 valve closed
8/27/2011	3:34:02 PM	PH3 valve closed
8/27/2011	3:34:02 PM	SiCl4 pre valve closed
8/27/2011	3:34:02 PM	SiCl4 post valve closed
8/27/2011	3:34:02 PM	Main Vac valve closed
8/27/2011	3:34:02 PM	Bypass valve closed
8/27/2011	3:34:02 PM	Bubbler valve closed
8/27/2011	3:34:02 PM	Helium MFC set to  0.000000
8/27/2011	3:34:02 PM	H2 MFC set to  0.000000
8/27/2011	3:34:02 PM	BCl3 MFC set to  0.000000
8/27/2011	3:34:02 PM	PHl3 MFC set to  0.000000
8/27/2011	3:34:02 PM	SiCl4 MFC set to  0.000000
8/27/2011	3:34:02 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	3:34:02 PM	Tube furnace set to 0
8/27/2011	3:34:03 PM	Run finished at 3:34 PM
8/27/2011	3:53:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	3:53:37 PM	Recipe started at 3:53 PM
8/27/2011	3:53:37 PM	Helium valve closed
8/27/2011	3:53:37 PM	H2 valve closed
8/27/2011	3:53:37 PM	BCl3 valve closed
8/27/2011	3:53:37 PM	PH3 valve closed
8/27/2011	3:53:37 PM	SiCl4 pre valve closed
8/27/2011	3:53:37 PM	SiCl4 post valve closed
8/27/2011	3:53:37 PM	Main Vac valve closed
8/27/2011	3:53:37 PM	Bypass valve closed
8/27/2011	3:53:37 PM	Bubbler valve closed
8/27/2011	3:53:37 PM	Helium MFC set to  0.000000
8/27/2011	3:53:37 PM	H2 MFC set to  0.000000
8/27/2011	3:53:37 PM	BCl3 MFC set to  0.000000
8/27/2011	3:53:37 PM	PHl3 MFC set to  0.000000
8/27/2011	3:53:37 PM	SiCl4 MFC set to  0.000000
8/27/2011	3:53:37 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	3:53:37 PM	Tube furnace set to 0
8/27/2011	3:53:40 PM	H2 valve closed
8/27/2011	3:53:40 PM	BCl3 valve closed
8/27/2011	3:53:40 PM	PH3 valve closed
8/27/2011	3:53:40 PM	SiCl4 pre valve closed
8/27/2011	3:53:40 PM	SiCl4 post valve closed
8/27/2011	3:53:40 PM	Main Vac valve closed
8/27/2011	3:53:40 PM	Bypass valve closed
8/27/2011	3:53:40 PM	Bubbler valve closed
8/27/2011	3:53:40 PM	Helium valve opened
8/27/2011	3:53:40 PM	Helium MFC set to  500.000000
8/27/2011	3:53:40 PM	H2 MFC set to  0.000000
8/27/2011	3:53:40 PM	BCl3 MFC set to  0.000000
8/27/2011	3:53:40 PM	PHl3 MFC set to  0.000000
8/27/2011	3:53:40 PM	SiCl4 MFC set to  0.000000
8/27/2011	3:53:40 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	3:53:40 PM	Tube furnace set to 0
8/27/2011	3:53:41 PM	Helium valve closed
8/27/2011	3:53:41 PM	H2 valve closed
8/27/2011	3:53:41 PM	BCl3 valve closed
8/27/2011	3:53:41 PM	PH3 valve closed
8/27/2011	3:53:41 PM	SiCl4 pre valve closed
8/27/2011	3:53:41 PM	SiCl4 post valve closed
8/27/2011	3:53:41 PM	Main Vac valve closed
8/27/2011	3:53:41 PM	Bypass valve closed
8/27/2011	3:53:41 PM	Bubbler valve closed
8/27/2011	3:53:41 PM	Helium MFC set to  0.000000
8/27/2011	3:53:41 PM	H2 MFC set to  0.000000
8/27/2011	3:53:41 PM	BCl3 MFC set to  0.000000
8/27/2011	3:53:41 PM	PHl3 MFC set to  0.000000
8/27/2011	3:53:41 PM	SiCl4 MFC set to  0.000000
8/27/2011	3:53:41 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	3:53:41 PM	Tube furnace set to 0
8/27/2011	3:53:42 PM	Run finished at 3:53 PM
8/27/2011	3:53:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	3:58:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	3:58:53 PM	Recipe started at 3:58 PM
8/27/2011	3:58:53 PM	Helium valve closed
8/27/2011	3:58:53 PM	H2 valve closed
8/27/2011	3:58:53 PM	BCl3 valve closed
8/27/2011	3:58:53 PM	PH3 valve closed
8/27/2011	3:58:53 PM	SiCl4 pre valve closed
8/27/2011	3:58:53 PM	SiCl4 post valve closed
8/27/2011	3:58:53 PM	Main Vac valve closed
8/27/2011	3:58:53 PM	Bypass valve closed
8/27/2011	3:58:53 PM	Bubbler valve closed
8/27/2011	3:58:53 PM	Helium MFC set to  0.000000
8/27/2011	3:58:53 PM	H2 MFC set to  0.000000
8/27/2011	3:58:53 PM	BCl3 MFC set to  0.000000
8/27/2011	3:58:53 PM	PHl3 MFC set to  0.000000
8/27/2011	3:58:53 PM	SiCl4 MFC set to  0.000000
8/27/2011	3:58:53 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	3:58:53 PM	Tube furnace set to 0
8/27/2011	3:58:56 PM	H2 valve closed
8/27/2011	3:58:56 PM	BCl3 valve closed
8/27/2011	3:58:56 PM	PH3 valve closed
8/27/2011	3:58:56 PM	SiCl4 pre valve closed
8/27/2011	3:58:56 PM	SiCl4 post valve closed
8/27/2011	3:58:56 PM	Main Vac valve closed
8/27/2011	3:58:56 PM	Bypass valve closed
8/27/2011	3:58:56 PM	Bubbler valve closed
8/27/2011	3:58:56 PM	Helium valve opened
8/27/2011	3:58:56 PM	Helium MFC set to  500.000000
8/27/2011	3:58:56 PM	H2 MFC set to  0.000000
8/27/2011	3:58:56 PM	BCl3 MFC set to  0.000000
8/27/2011	3:58:56 PM	PHl3 MFC set to  0.000000
8/27/2011	3:58:56 PM	SiCl4 MFC set to  0.000000
8/27/2011	3:58:56 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	3:58:56 PM	Tube furnace set to 0
8/27/2011	3:59:00 PM	Helium valve closed
8/27/2011	3:59:00 PM	H2 valve closed
8/27/2011	3:59:00 PM	BCl3 valve closed
8/27/2011	3:59:00 PM	PH3 valve closed
8/27/2011	3:59:00 PM	SiCl4 pre valve closed
8/27/2011	3:59:00 PM	SiCl4 post valve closed
8/27/2011	3:59:00 PM	Main Vac valve closed
8/27/2011	3:59:00 PM	Bypass valve closed
8/27/2011	3:59:00 PM	Bubbler valve closed
8/27/2011	3:59:00 PM	Helium MFC set to  0.000000
8/27/2011	3:59:00 PM	H2 MFC set to  0.000000
8/27/2011	3:59:00 PM	BCl3 MFC set to  0.000000
8/27/2011	3:59:00 PM	PHl3 MFC set to  0.000000
8/27/2011	3:59:00 PM	SiCl4 MFC set to  0.000000
8/27/2011	3:59:00 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	3:59:00 PM	Tube furnace set to 0
8/27/2011	3:59:01 PM	Run finished at 3:59 PM
8/27/2011	3:59:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	4:01:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	4:01:27 PM	Recipe started at 4:01 PM
8/27/2011	4:01:27 PM	Helium valve closed
8/27/2011	4:01:27 PM	H2 valve closed
8/27/2011	4:01:27 PM	BCl3 valve closed
8/27/2011	4:01:27 PM	PH3 valve closed
8/27/2011	4:01:27 PM	SiCl4 pre valve closed
8/27/2011	4:01:27 PM	SiCl4 post valve closed
8/27/2011	4:01:27 PM	Main Vac valve closed
8/27/2011	4:01:27 PM	Bypass valve closed
8/27/2011	4:01:27 PM	Bubbler valve closed
8/27/2011	4:01:27 PM	Helium MFC set to  0.000000
8/27/2011	4:01:27 PM	H2 MFC set to  0.000000
8/27/2011	4:01:27 PM	BCl3 MFC set to  0.000000
8/27/2011	4:01:27 PM	PHl3 MFC set to  0.000000
8/27/2011	4:01:27 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:01:27 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:01:27 PM	Tube furnace set to 0
8/27/2011	4:01:30 PM	H2 valve closed
8/27/2011	4:01:30 PM	BCl3 valve closed
8/27/2011	4:01:30 PM	PH3 valve closed
8/27/2011	4:01:30 PM	SiCl4 pre valve closed
8/27/2011	4:01:31 PM	SiCl4 post valve closed
8/27/2011	4:01:31 PM	Main Vac valve closed
8/27/2011	4:01:31 PM	Bypass valve closed
8/27/2011	4:01:31 PM	Bubbler valve closed
8/27/2011	4:01:31 PM	Helium valve opened
8/27/2011	4:01:31 PM	Helium MFC set to  500.000000
8/27/2011	4:01:31 PM	H2 MFC set to  0.000000
8/27/2011	4:01:31 PM	BCl3 MFC set to  0.000000
8/27/2011	4:01:31 PM	PHl3 MFC set to  0.000000
8/27/2011	4:01:31 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:01:31 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:01:31 PM	Tube furnace set to 0
8/27/2011	4:01:32 PM	Helium valve closed
8/27/2011	4:01:32 PM	H2 valve closed
8/27/2011	4:01:32 PM	BCl3 valve closed
8/27/2011	4:01:32 PM	PH3 valve closed
8/27/2011	4:01:32 PM	SiCl4 pre valve closed
8/27/2011	4:01:32 PM	SiCl4 post valve closed
8/27/2011	4:01:32 PM	Main Vac valve closed
8/27/2011	4:01:32 PM	Bypass valve closed
8/27/2011	4:01:32 PM	Bubbler valve closed
8/27/2011	4:01:32 PM	Helium MFC set to  0.000000
8/27/2011	4:01:32 PM	H2 MFC set to  0.000000
8/27/2011	4:01:32 PM	BCl3 MFC set to  0.000000
8/27/2011	4:01:32 PM	PHl3 MFC set to  0.000000
8/27/2011	4:01:32 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:01:32 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:01:32 PM	Tube furnace set to 0
8/27/2011	4:01:33 PM	Run finished at 4:01 PM
8/27/2011	4:01:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	4:08:04 PM	Recipe started at 4:07 PM
8/27/2011	4:08:04 PM	Helium valve closed
8/27/2011	4:08:04 PM	H2 valve closed
8/27/2011	4:08:04 PM	BCl3 valve closed
8/27/2011	4:08:04 PM	PH3 valve closed
8/27/2011	4:08:04 PM	SiCl4 pre valve closed
8/27/2011	4:08:04 PM	SiCl4 post valve closed
8/27/2011	4:08:04 PM	Main Vac valve closed
8/27/2011	4:08:04 PM	Bubbler valve closed
8/27/2011	4:08:04 PM	Bypass valve opened
8/27/2011	4:08:04 PM	Helium MFC set to  0.000000
8/27/2011	4:08:04 PM	H2 MFC set to  0.000000
8/27/2011	4:08:04 PM	BCl3 MFC set to  0.000000
8/27/2011	4:08:04 PM	PHl3 MFC set to  0.000000
8/27/2011	4:08:04 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:08:04 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:08:04 PM	Tube furnace set to 0
8/27/2011	4:09:10 PM	Helium valve closed
8/27/2011	4:09:10 PM	H2 valve closed
8/27/2011	4:09:10 PM	BCl3 valve closed
8/27/2011	4:09:10 PM	PH3 valve closed
8/27/2011	4:09:10 PM	SiCl4 pre valve closed
8/27/2011	4:09:10 PM	SiCl4 post valve closed
8/27/2011	4:09:10 PM	Main Vac valve closed
8/27/2011	4:09:10 PM	Bubbler valve closed
8/27/2011	4:09:10 PM	Bypass valve opened
8/27/2011	4:09:10 PM	Helium MFC set to  0.000000
8/27/2011	4:09:10 PM	H2 MFC set to  0.000000
8/27/2011	4:09:10 PM	BCl3 MFC set to  0.000000
8/27/2011	4:09:10 PM	PHl3 MFC set to  0.000000
8/27/2011	4:09:10 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:09:10 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:09:10 PM	Tube furnace set to 0
8/27/2011	4:09:40 PM	Helium valve closed
8/27/2011	4:09:40 PM	H2 valve closed
8/27/2011	4:09:40 PM	BCl3 valve closed
8/27/2011	4:09:40 PM	PH3 valve closed
8/27/2011	4:09:40 PM	SiCl4 pre valve closed
8/27/2011	4:09:40 PM	SiCl4 post valve closed
8/27/2011	4:09:40 PM	Bypass valve closed
8/27/2011	4:09:40 PM	Bubbler valve closed
8/27/2011	4:09:40 PM	Main Vac valve opened
8/27/2011	4:09:40 PM	Helium MFC set to  0.000000
8/27/2011	4:09:40 PM	H2 MFC set to  0.000000
8/27/2011	4:09:40 PM	BCl3 MFC set to  0.000000
8/27/2011	4:09:40 PM	PHl3 MFC set to  0.000000
8/27/2011	4:09:40 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:09:40 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:09:40 PM	Tube furnace set to 0
8/27/2011	4:39:40 PM	H2 valve closed
8/27/2011	4:39:40 PM	BCl3 valve closed
8/27/2011	4:39:40 PM	PH3 valve closed
8/27/2011	4:39:40 PM	SiCl4 pre valve closed
8/27/2011	4:39:40 PM	SiCl4 post valve closed
8/27/2011	4:39:40 PM	Bypass valve closed
8/27/2011	4:39:40 PM	Bubbler valve closed
8/27/2011	4:39:40 PM	Helium valve opened
8/27/2011	4:39:40 PM	Main Vac valve opened
8/27/2011	4:39:40 PM	Helium MFC set to  20.000000
8/27/2011	4:39:40 PM	H2 MFC set to  0.000000
8/27/2011	4:39:40 PM	BCl3 MFC set to  0.000000
8/27/2011	4:39:40 PM	PHl3 MFC set to  0.000000
8/27/2011	4:39:40 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:39:40 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:39:40 PM	Tube furnace set to 0
8/27/2011	4:40:10 PM	Helium valve closed
8/27/2011	4:40:10 PM	H2 valve closed
8/27/2011	4:40:10 PM	BCl3 valve closed
8/27/2011	4:40:10 PM	PH3 valve closed
8/27/2011	4:40:10 PM	SiCl4 pre valve closed
8/27/2011	4:40:10 PM	SiCl4 post valve closed
8/27/2011	4:40:10 PM	Bypass valve closed
8/27/2011	4:40:10 PM	Bubbler valve closed
8/27/2011	4:40:10 PM	Main Vac valve opened
8/27/2011	4:40:10 PM	Helium MFC set to  0.000000
8/27/2011	4:40:10 PM	H2 MFC set to  0.000000
8/27/2011	4:40:10 PM	BCl3 MFC set to  0.000000
8/27/2011	4:40:10 PM	PHl3 MFC set to  0.000000
8/27/2011	4:40:10 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:40:10 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:40:10 PM	Tube furnace set to 0
8/27/2011	4:40:40 PM	H2 valve closed
8/27/2011	4:40:40 PM	BCl3 valve closed
8/27/2011	4:40:40 PM	PH3 valve closed
8/27/2011	4:40:40 PM	SiCl4 pre valve closed
8/27/2011	4:40:40 PM	SiCl4 post valve closed
8/27/2011	4:40:40 PM	Bypass valve closed
8/27/2011	4:40:40 PM	Bubbler valve closed
8/27/2011	4:40:40 PM	Helium valve opened
8/27/2011	4:40:40 PM	Main Vac valve opened
8/27/2011	4:40:40 PM	Helium MFC set to  20.000000
8/27/2011	4:40:40 PM	H2 MFC set to  0.000000
8/27/2011	4:40:40 PM	BCl3 MFC set to  0.000000
8/27/2011	4:40:40 PM	PHl3 MFC set to  0.000000
8/27/2011	4:40:40 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:40:40 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:40:40 PM	Tube furnace set to 0
8/27/2011	4:41:10 PM	Helium valve closed
8/27/2011	4:41:10 PM	H2 valve closed
8/27/2011	4:41:10 PM	BCl3 valve closed
8/27/2011	4:41:10 PM	PH3 valve closed
8/27/2011	4:41:10 PM	SiCl4 pre valve closed
8/27/2011	4:41:10 PM	SiCl4 post valve closed
8/27/2011	4:41:10 PM	Bypass valve closed
8/27/2011	4:41:10 PM	Bubbler valve closed
8/27/2011	4:41:10 PM	Main Vac valve opened
8/27/2011	4:41:10 PM	Helium MFC set to  0.000000
8/27/2011	4:41:10 PM	H2 MFC set to  0.000000
8/27/2011	4:41:10 PM	BCl3 MFC set to  0.000000
8/27/2011	4:41:10 PM	PHl3 MFC set to  0.000000
8/27/2011	4:41:10 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:41:10 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:41:11 PM	Tube furnace set to 0
8/27/2011	4:41:41 PM	H2 valve closed
8/27/2011	4:41:41 PM	BCl3 valve closed
8/27/2011	4:41:41 PM	PH3 valve closed
8/27/2011	4:41:41 PM	SiCl4 pre valve closed
8/27/2011	4:41:41 PM	SiCl4 post valve closed
8/27/2011	4:41:41 PM	Bypass valve closed
8/27/2011	4:41:41 PM	Bubbler valve closed
8/27/2011	4:41:41 PM	Helium valve opened
8/27/2011	4:41:41 PM	Main Vac valve opened
8/27/2011	4:41:41 PM	Helium MFC set to  20.000000
8/27/2011	4:41:41 PM	H2 MFC set to  0.000000
8/27/2011	4:41:41 PM	BCl3 MFC set to  0.000000
8/27/2011	4:41:41 PM	PHl3 MFC set to  0.000000
8/27/2011	4:41:41 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:41:41 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:41:41 PM	Tube furnace set to 0
8/27/2011	4:42:11 PM	Helium valve closed
8/27/2011	4:42:11 PM	H2 valve closed
8/27/2011	4:42:11 PM	BCl3 valve closed
8/27/2011	4:42:11 PM	PH3 valve closed
8/27/2011	4:42:11 PM	SiCl4 pre valve closed
8/27/2011	4:42:11 PM	SiCl4 post valve closed
8/27/2011	4:42:11 PM	Bypass valve closed
8/27/2011	4:42:11 PM	Bubbler valve closed
8/27/2011	4:42:11 PM	Main Vac valve opened
8/27/2011	4:42:11 PM	Helium MFC set to  0.000000
8/27/2011	4:42:11 PM	H2 MFC set to  0.000000
8/27/2011	4:42:11 PM	BCl3 MFC set to  0.000000
8/27/2011	4:42:11 PM	PHl3 MFC set to  0.000000
8/27/2011	4:42:11 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:42:11 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:42:11 PM	Tube furnace set to 0
8/27/2011	4:42:41 PM	H2 valve closed
8/27/2011	4:42:41 PM	BCl3 valve closed
8/27/2011	4:42:41 PM	PH3 valve closed
8/27/2011	4:42:41 PM	SiCl4 pre valve closed
8/27/2011	4:42:41 PM	SiCl4 post valve closed
8/27/2011	4:42:41 PM	Bypass valve closed
8/27/2011	4:42:41 PM	Bubbler valve closed
8/27/2011	4:42:41 PM	Helium valve opened
8/27/2011	4:42:41 PM	Main Vac valve opened
8/27/2011	4:42:41 PM	Helium MFC set to  20.000000
8/27/2011	4:42:41 PM	H2 MFC set to  0.000000
8/27/2011	4:42:41 PM	BCl3 MFC set to  0.000000
8/27/2011	4:42:41 PM	PHl3 MFC set to  0.000000
8/27/2011	4:42:41 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:42:41 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:42:41 PM	Tube furnace set to 0
8/27/2011	4:43:11 PM	Helium valve closed
8/27/2011	4:43:11 PM	H2 valve closed
8/27/2011	4:43:11 PM	BCl3 valve closed
8/27/2011	4:43:11 PM	PH3 valve closed
8/27/2011	4:43:11 PM	SiCl4 pre valve closed
8/27/2011	4:43:11 PM	SiCl4 post valve closed
8/27/2011	4:43:11 PM	Bypass valve closed
8/27/2011	4:43:11 PM	Bubbler valve closed
8/27/2011	4:43:11 PM	Main Vac valve opened
8/27/2011	4:43:11 PM	Helium MFC set to  0.000000
8/27/2011	4:43:11 PM	H2 MFC set to  0.000000
8/27/2011	4:43:11 PM	BCl3 MFC set to  0.000000
8/27/2011	4:43:11 PM	PHl3 MFC set to  0.000000
8/27/2011	4:43:11 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:43:11 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:43:11 PM	Tube furnace set to 0
8/27/2011	4:43:41 PM	H2 valve closed
8/27/2011	4:43:41 PM	BCl3 valve closed
8/27/2011	4:43:41 PM	PH3 valve closed
8/27/2011	4:43:41 PM	SiCl4 pre valve closed
8/27/2011	4:43:41 PM	SiCl4 post valve closed
8/27/2011	4:43:41 PM	Bypass valve closed
8/27/2011	4:43:41 PM	Bubbler valve closed
8/27/2011	4:43:41 PM	Helium valve opened
8/27/2011	4:43:41 PM	Main Vac valve opened
8/27/2011	4:43:41 PM	Helium MFC set to  20.000000
8/27/2011	4:43:41 PM	H2 MFC set to  0.000000
8/27/2011	4:43:41 PM	BCl3 MFC set to  0.000000
8/27/2011	4:43:41 PM	PHl3 MFC set to  0.000000
8/27/2011	4:43:41 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:43:41 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:43:42 PM	Tube furnace set to 0
8/27/2011	4:44:12 PM	Helium valve closed
8/27/2011	4:44:12 PM	H2 valve closed
8/27/2011	4:44:12 PM	BCl3 valve closed
8/27/2011	4:44:12 PM	PH3 valve closed
8/27/2011	4:44:12 PM	SiCl4 pre valve closed
8/27/2011	4:44:12 PM	SiCl4 post valve closed
8/27/2011	4:44:12 PM	Bypass valve closed
8/27/2011	4:44:12 PM	Bubbler valve closed
8/27/2011	4:44:12 PM	Main Vac valve opened
8/27/2011	4:44:12 PM	Helium MFC set to  0.000000
8/27/2011	4:44:12 PM	H2 MFC set to  0.000000
8/27/2011	4:44:12 PM	BCl3 MFC set to  0.000000
8/27/2011	4:44:12 PM	PHl3 MFC set to  0.000000
8/27/2011	4:44:12 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:44:12 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:44:12 PM	Tube furnace set to 0
8/27/2011	4:44:42 PM	H2 valve closed
8/27/2011	4:44:42 PM	BCl3 valve closed
8/27/2011	4:44:42 PM	PH3 valve closed
8/27/2011	4:44:42 PM	SiCl4 pre valve closed
8/27/2011	4:44:42 PM	SiCl4 post valve closed
8/27/2011	4:44:42 PM	Bypass valve closed
8/27/2011	4:44:42 PM	Bubbler valve closed
8/27/2011	4:44:42 PM	Helium valve opened
8/27/2011	4:44:42 PM	Main Vac valve opened
8/27/2011	4:44:42 PM	Helium MFC set to  20.000000
8/27/2011	4:44:42 PM	H2 MFC set to  0.000000
8/27/2011	4:44:42 PM	BCl3 MFC set to  0.000000
8/27/2011	4:44:42 PM	PHl3 MFC set to  0.000000
8/27/2011	4:44:42 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:44:42 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:44:42 PM	Tube furnace set to 0
8/27/2011	4:45:12 PM	Helium valve closed
8/27/2011	4:45:12 PM	H2 valve closed
8/27/2011	4:45:12 PM	BCl3 valve closed
8/27/2011	4:45:12 PM	PH3 valve closed
8/27/2011	4:45:12 PM	SiCl4 pre valve closed
8/27/2011	4:45:12 PM	SiCl4 post valve closed
8/27/2011	4:45:12 PM	Bypass valve closed
8/27/2011	4:45:12 PM	Bubbler valve closed
8/27/2011	4:45:12 PM	Main Vac valve opened
8/27/2011	4:45:12 PM	Helium MFC set to  0.000000
8/27/2011	4:45:12 PM	H2 MFC set to  0.000000
8/27/2011	4:45:12 PM	BCl3 MFC set to  0.000000
8/27/2011	4:45:12 PM	PHl3 MFC set to  0.000000
8/27/2011	4:45:12 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:45:12 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:45:12 PM	Tube furnace set to 0
8/27/2011	4:45:42 PM	H2 valve closed
8/27/2011	4:45:42 PM	BCl3 valve closed
8/27/2011	4:45:42 PM	PH3 valve closed
8/27/2011	4:45:42 PM	SiCl4 pre valve closed
8/27/2011	4:45:42 PM	SiCl4 post valve closed
8/27/2011	4:45:42 PM	Bypass valve closed
8/27/2011	4:45:42 PM	Bubbler valve closed
8/27/2011	4:45:42 PM	Helium valve opened
8/27/2011	4:45:42 PM	Main Vac valve opened
8/27/2011	4:45:42 PM	Helium MFC set to  20.000000
8/27/2011	4:45:42 PM	H2 MFC set to  0.000000
8/27/2011	4:45:42 PM	BCl3 MFC set to  0.000000
8/27/2011	4:45:42 PM	PHl3 MFC set to  0.000000
8/27/2011	4:45:42 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:45:42 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:45:42 PM	Tube furnace set to 0
8/27/2011	4:46:12 PM	Helium valve closed
8/27/2011	4:46:12 PM	H2 valve closed
8/27/2011	4:46:12 PM	BCl3 valve closed
8/27/2011	4:46:12 PM	PH3 valve closed
8/27/2011	4:46:12 PM	SiCl4 pre valve closed
8/27/2011	4:46:12 PM	SiCl4 post valve closed
8/27/2011	4:46:12 PM	Bypass valve closed
8/27/2011	4:46:12 PM	Bubbler valve closed
8/27/2011	4:46:12 PM	Main Vac valve opened
8/27/2011	4:46:12 PM	Helium MFC set to  0.000000
8/27/2011	4:46:13 PM	H2 MFC set to  0.000000
8/27/2011	4:46:13 PM	BCl3 MFC set to  0.000000
8/27/2011	4:46:13 PM	PHl3 MFC set to  0.000000
8/27/2011	4:46:13 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:46:13 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:46:13 PM	Tube furnace set to 0
8/27/2011	4:46:43 PM	H2 valve closed
8/27/2011	4:46:43 PM	BCl3 valve closed
8/27/2011	4:46:43 PM	PH3 valve closed
8/27/2011	4:46:43 PM	SiCl4 pre valve closed
8/27/2011	4:46:43 PM	SiCl4 post valve closed
8/27/2011	4:46:43 PM	Bypass valve closed
8/27/2011	4:46:43 PM	Bubbler valve closed
8/27/2011	4:46:43 PM	Helium valve opened
8/27/2011	4:46:43 PM	Main Vac valve opened
8/27/2011	4:46:43 PM	Helium MFC set to  20.000000
8/27/2011	4:46:43 PM	H2 MFC set to  0.000000
8/27/2011	4:46:43 PM	BCl3 MFC set to  0.000000
8/27/2011	4:46:43 PM	PHl3 MFC set to  0.000000
8/27/2011	4:46:43 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:46:43 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:46:43 PM	Tube furnace set to 0
8/27/2011	4:47:13 PM	Helium valve closed
8/27/2011	4:47:13 PM	H2 valve closed
8/27/2011	4:47:13 PM	BCl3 valve closed
8/27/2011	4:47:13 PM	PH3 valve closed
8/27/2011	4:47:13 PM	SiCl4 pre valve closed
8/27/2011	4:47:13 PM	SiCl4 post valve closed
8/27/2011	4:47:13 PM	Bypass valve closed
8/27/2011	4:47:13 PM	Bubbler valve closed
8/27/2011	4:47:13 PM	Main Vac valve opened
8/27/2011	4:47:13 PM	Helium MFC set to  0.000000
8/27/2011	4:47:13 PM	H2 MFC set to  0.000000
8/27/2011	4:47:13 PM	BCl3 MFC set to  0.000000
8/27/2011	4:47:13 PM	PHl3 MFC set to  0.000000
8/27/2011	4:47:13 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:47:13 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:47:13 PM	Tube furnace set to 0
8/27/2011	4:47:43 PM	H2 valve closed
8/27/2011	4:47:43 PM	BCl3 valve closed
8/27/2011	4:47:43 PM	PH3 valve closed
8/27/2011	4:47:43 PM	SiCl4 pre valve closed
8/27/2011	4:47:43 PM	SiCl4 post valve closed
8/27/2011	4:47:43 PM	Bypass valve closed
8/27/2011	4:47:43 PM	Bubbler valve closed
8/27/2011	4:47:43 PM	Helium valve opened
8/27/2011	4:47:43 PM	Main Vac valve opened
8/27/2011	4:47:43 PM	Helium MFC set to  20.000000
8/27/2011	4:47:43 PM	H2 MFC set to  0.000000
8/27/2011	4:47:43 PM	BCl3 MFC set to  0.000000
8/27/2011	4:47:43 PM	PHl3 MFC set to  0.000000
8/27/2011	4:47:43 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:47:43 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:47:43 PM	Tube furnace set to 0
8/27/2011	4:48:13 PM	Helium valve closed
8/27/2011	4:48:13 PM	H2 valve closed
8/27/2011	4:48:13 PM	BCl3 valve closed
8/27/2011	4:48:13 PM	PH3 valve closed
8/27/2011	4:48:13 PM	SiCl4 pre valve closed
8/27/2011	4:48:13 PM	SiCl4 post valve closed
8/27/2011	4:48:13 PM	Bypass valve closed
8/27/2011	4:48:13 PM	Bubbler valve closed
8/27/2011	4:48:13 PM	Main Vac valve opened
8/27/2011	4:48:13 PM	Helium MFC set to  0.000000
8/27/2011	4:48:13 PM	H2 MFC set to  0.000000
8/27/2011	4:48:13 PM	BCl3 MFC set to  0.000000
8/27/2011	4:48:13 PM	PHl3 MFC set to  0.000000
8/27/2011	4:48:13 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:48:13 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:48:14 PM	Tube furnace set to 0
8/27/2011	4:48:44 PM	H2 valve closed
8/27/2011	4:48:44 PM	BCl3 valve closed
8/27/2011	4:48:44 PM	PH3 valve closed
8/27/2011	4:48:44 PM	SiCl4 pre valve closed
8/27/2011	4:48:44 PM	SiCl4 post valve closed
8/27/2011	4:48:44 PM	Bypass valve closed
8/27/2011	4:48:44 PM	Bubbler valve closed
8/27/2011	4:48:44 PM	Helium valve opened
8/27/2011	4:48:44 PM	Main Vac valve opened
8/27/2011	4:48:44 PM	Helium MFC set to  20.000000
8/27/2011	4:48:44 PM	H2 MFC set to  0.000000
8/27/2011	4:48:44 PM	BCl3 MFC set to  0.000000
8/27/2011	4:48:44 PM	PHl3 MFC set to  0.000000
8/27/2011	4:48:44 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:48:44 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:48:44 PM	Tube furnace set to 0
8/27/2011	4:49:14 PM	Helium valve closed
8/27/2011	4:49:14 PM	H2 valve closed
8/27/2011	4:49:14 PM	BCl3 valve closed
8/27/2011	4:49:14 PM	PH3 valve closed
8/27/2011	4:49:14 PM	SiCl4 pre valve closed
8/27/2011	4:49:14 PM	SiCl4 post valve closed
8/27/2011	4:49:14 PM	Bypass valve closed
8/27/2011	4:49:14 PM	Bubbler valve closed
8/27/2011	4:49:14 PM	Main Vac valve opened
8/27/2011	4:49:14 PM	Helium MFC set to  0.000000
8/27/2011	4:49:14 PM	H2 MFC set to  0.000000
8/27/2011	4:49:14 PM	BCl3 MFC set to  0.000000
8/27/2011	4:49:14 PM	PHl3 MFC set to  0.000000
8/27/2011	4:49:14 PM	SiCl4 MFC set to  0.000000
8/27/2011	4:49:14 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	4:49:14 PM	Tube furnace set to 0
8/27/2011	4:49:15 PM	Run finished at 4:49 PM
8/27/2011	6:30:32 PM	Main Vac valve closed
8/27/2011	6:30:52 PM	Main Vac valve opened
8/27/2011	6:31:30 PM	Recipe started at 6:31 PM
8/27/2011	6:31:30 PM	Helium valve closed
8/27/2011	6:31:30 PM	H2 valve closed
8/27/2011	6:31:30 PM	BCl3 valve closed
8/27/2011	6:31:30 PM	PH3 valve closed
8/27/2011	6:31:30 PM	SiCl4 pre valve closed
8/27/2011	6:31:30 PM	SiCl4 post valve closed
8/27/2011	6:31:30 PM	Main Vac valve closed
8/27/2011	6:31:30 PM	Bypass valve closed
8/27/2011	6:31:30 PM	Bubbler valve closed
8/27/2011	6:31:30 PM	Helium MFC set to  0.000000
8/27/2011	6:31:30 PM	H2 MFC set to  0.000000
8/27/2011	6:31:30 PM	BCl3 MFC set to  0.000000
8/27/2011	6:31:30 PM	PHl3 MFC set to  0.000000
8/27/2011	6:31:30 PM	SiCl4 MFC set to  0.000000
8/27/2011	6:31:30 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	6:31:30 PM	Tube furnace set to 0
8/27/2011	6:31:33 PM	Helium valve closed
8/27/2011	6:31:33 PM	BCl3 valve closed
8/27/2011	6:31:33 PM	PH3 valve closed
8/27/2011	6:31:33 PM	SiCl4 pre valve closed
8/27/2011	6:31:33 PM	SiCl4 post valve closed
8/27/2011	6:31:33 PM	Main Vac valve closed
8/27/2011	6:31:33 PM	Bypass valve closed
8/27/2011	6:31:33 PM	Bubbler valve closed
8/27/2011	6:31:33 PM	H2 valve opened
8/27/2011	6:31:33 PM	Helium MFC set to  0.000000
8/27/2011	6:31:33 PM	H2 MFC set to  500.000000
8/27/2011	6:31:33 PM	BCl3 MFC set to  0.000000
8/27/2011	6:31:33 PM	PHl3 MFC set to  0.000000
8/27/2011	6:31:33 PM	SiCl4 MFC set to  0.000000
8/27/2011	6:31:33 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	6:31:33 PM	Tube furnace set to 0
8/27/2011	6:32:39 PM	Helium valve closed
8/27/2011	6:32:39 PM	BCl3 valve closed
8/27/2011	6:32:39 PM	PH3 valve closed
8/27/2011	6:32:39 PM	SiCl4 pre valve closed
8/27/2011	6:32:39 PM	SiCl4 post valve closed
8/27/2011	6:32:39 PM	Main Vac valve closed
8/27/2011	6:32:39 PM	Bypass valve closed
8/27/2011	6:32:39 PM	H2 valve opened
8/27/2011	6:32:39 PM	Bubbler valve opened
8/27/2011	6:32:39 PM	Helium MFC set to  0.000000
8/27/2011	6:32:39 PM	H2 MFC set to  500.000000
8/27/2011	6:32:39 PM	BCl3 MFC set to  0.000000
8/27/2011	6:32:39 PM	PHl3 MFC set to  0.000000
8/27/2011	6:32:39 PM	SiCl4 MFC set to  0.000000
8/27/2011	6:32:39 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	6:32:39 PM	Tube furnace set to 0
8/27/2011	6:32:40 PM	Helium valve closed
8/27/2011	6:32:40 PM	BCl3 valve closed
8/27/2011	6:32:40 PM	PH3 valve closed
8/27/2011	6:32:40 PM	SiCl4 pre valve closed
8/27/2011	6:32:40 PM	SiCl4 post valve closed
8/27/2011	6:32:40 PM	Main Vac valve closed
8/27/2011	6:32:40 PM	Bypass valve closed
8/27/2011	6:32:40 PM	H2 valve opened
8/27/2011	6:32:40 PM	Bubbler valve opened
8/27/2011	6:32:40 PM	Helium MFC set to  0.000000
8/27/2011	6:32:40 PM	H2 MFC set to  500.000000
8/27/2011	6:32:40 PM	BCl3 MFC set to  0.000000
8/27/2011	6:32:40 PM	PHl3 MFC set to  0.000000
8/27/2011	6:32:40 PM	SiCl4 MFC set to  0.000000
8/27/2011	6:32:40 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	6:32:40 PM	Tube furnace set to 1000
8/27/2011	6:52:40 PM	Helium valve closed
8/27/2011	6:52:40 PM	BCl3 valve closed
8/27/2011	6:52:40 PM	PH3 valve closed
8/27/2011	6:52:40 PM	SiCl4 pre valve closed
8/27/2011	6:52:40 PM	SiCl4 post valve closed
8/27/2011	6:52:40 PM	Main Vac valve closed
8/27/2011	6:52:40 PM	Bypass valve closed
8/27/2011	6:52:40 PM	H2 valve opened
8/27/2011	6:52:40 PM	Bubbler valve opened
8/27/2011	6:52:40 PM	Helium MFC set to  0.000000
8/27/2011	6:52:40 PM	H2 MFC set to  500.000000
8/27/2011	6:52:40 PM	BCl3 MFC set to  0.000000
8/27/2011	6:52:40 PM	PHl3 MFC set to  0.000000
8/27/2011	6:52:40 PM	SiCl4 MFC set to  0.000000
8/27/2011	6:52:40 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	6:52:40 PM	Tube furnace set to 1000
8/27/2011	7:12:40 PM	Helium valve closed
8/27/2011	7:12:40 PM	PH3 valve closed
8/27/2011	7:12:40 PM	Main Vac valve closed
8/27/2011	7:12:40 PM	Bypass valve closed
8/27/2011	7:12:40 PM	H2 valve opened
8/27/2011	7:12:40 PM	BCl3 valve opened
8/27/2011	7:12:40 PM	SiCl4 pre valve opened
8/27/2011	7:12:40 PM	SiCl4 post valve opened
8/27/2011	7:12:40 PM	Bubbler valve opened
8/27/2011	7:12:40 PM	Helium MFC set to  0.000000
8/27/2011	7:12:40 PM	H2 MFC set to  500.000000
8/27/2011	7:12:40 PM	BCl3 MFC set to  2.500000
8/27/2011	7:12:40 PM	PHl3 MFC set to  0.000000
8/27/2011	7:12:40 PM	SiCl4 MFC set to  50.000000
8/27/2011	7:12:40 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	7:12:40 PM	Tube furnace set to 1000
8/27/2011	7:27:10 PM	Helium valve closed
8/27/2011	7:27:10 PM	BCl3 valve closed
8/27/2011	7:27:10 PM	PH3 valve closed
8/27/2011	7:27:10 PM	SiCl4 pre valve closed
8/27/2011	7:27:10 PM	SiCl4 post valve closed
8/27/2011	7:27:10 PM	Main Vac valve closed
8/27/2011	7:27:10 PM	Bypass valve closed
8/27/2011	7:27:10 PM	H2 valve opened
8/27/2011	7:27:10 PM	Bubbler valve opened
8/27/2011	7:27:10 PM	Helium MFC set to  0.000000
8/27/2011	7:27:10 PM	H2 MFC set to  500.000000
8/27/2011	7:27:10 PM	BCl3 MFC set to  0.000000
8/27/2011	7:27:10 PM	PHl3 MFC set to  0.000000
8/27/2011	7:27:10 PM	SiCl4 MFC set to  0.000000
8/27/2011	7:27:10 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	7:27:11 PM	Tube furnace set to 750
8/27/2011	7:32:11 PM	H2 valve closed
8/27/2011	7:32:11 PM	BCl3 valve closed
8/27/2011	7:32:11 PM	PH3 valve closed
8/27/2011	7:32:11 PM	SiCl4 pre valve closed
8/27/2011	7:32:11 PM	SiCl4 post valve closed
8/27/2011	7:32:11 PM	Main Vac valve closed
8/27/2011	7:32:11 PM	Bypass valve closed
8/27/2011	7:32:11 PM	Helium valve opened
8/27/2011	7:32:11 PM	Bubbler valve opened
8/27/2011	7:32:11 PM	Helium MFC set to  500.000000
8/27/2011	7:32:11 PM	H2 MFC set to  0.000000
8/27/2011	7:32:11 PM	BCl3 MFC set to  0.000000
8/27/2011	7:32:11 PM	PHl3 MFC set to  0.000000
8/27/2011	7:32:11 PM	SiCl4 MFC set to  0.000000
8/27/2011	7:32:11 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	7:32:11 PM	Tube furnace set to 0
8/27/2011	7:52:11 PM	Helium valve closed
8/27/2011	7:52:11 PM	H2 valve closed
8/27/2011	7:52:11 PM	BCl3 valve closed
8/27/2011	7:52:11 PM	PH3 valve closed
8/27/2011	7:52:11 PM	SiCl4 pre valve closed
8/27/2011	7:52:11 PM	SiCl4 post valve closed
8/27/2011	7:52:11 PM	Main Vac valve closed
8/27/2011	7:52:11 PM	Bypass valve closed
8/27/2011	7:52:11 PM	Bubbler valve closed
8/27/2011	7:52:11 PM	Helium MFC set to  0.000000
8/27/2011	7:52:11 PM	H2 MFC set to  0.000000
8/27/2011	7:52:11 PM	BCl3 MFC set to  0.000000
8/27/2011	7:52:11 PM	PHl3 MFC set to  0.000000
8/27/2011	7:52:11 PM	SiCl4 MFC set to  0.000000
8/27/2011	7:52:11 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	7:52:11 PM	Tube furnace set to 0
8/27/2011	7:52:12 PM	Run finished at 7:52 PM
8/27/2011	8:46:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	8:46:13 PM	Recipe started at 8:46 PM
8/27/2011	8:46:13 PM	Helium valve closed
8/27/2011	8:46:13 PM	H2 valve closed
8/27/2011	8:46:13 PM	BCl3 valve closed
8/27/2011	8:46:13 PM	PH3 valve closed
8/27/2011	8:46:13 PM	SiCl4 pre valve closed
8/27/2011	8:46:13 PM	SiCl4 post valve closed
8/27/2011	8:46:13 PM	Main Vac valve closed
8/27/2011	8:46:13 PM	Bypass valve closed
8/27/2011	8:46:13 PM	Bubbler valve closed
8/27/2011	8:46:13 PM	Helium MFC set to  0.000000
8/27/2011	8:46:13 PM	H2 MFC set to  0.000000
8/27/2011	8:46:13 PM	BCl3 MFC set to  0.000000
8/27/2011	8:46:13 PM	PHl3 MFC set to  0.000000
8/27/2011	8:46:13 PM	SiCl4 MFC set to  0.000000
8/27/2011	8:46:13 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	8:46:14 PM	Tube furnace set to 0
8/27/2011	8:46:17 PM	H2 valve closed
8/27/2011	8:46:17 PM	BCl3 valve closed
8/27/2011	8:46:17 PM	PH3 valve closed
8/27/2011	8:46:17 PM	SiCl4 pre valve closed
8/27/2011	8:46:17 PM	SiCl4 post valve closed
8/27/2011	8:46:17 PM	Main Vac valve closed
8/27/2011	8:46:17 PM	Bypass valve closed
8/27/2011	8:46:17 PM	Bubbler valve closed
8/27/2011	8:46:17 PM	Helium valve opened
8/27/2011	8:46:17 PM	Helium MFC set to  500.000000
8/27/2011	8:46:17 PM	H2 MFC set to  0.000000
8/27/2011	8:46:17 PM	BCl3 MFC set to  0.000000
8/27/2011	8:46:17 PM	PHl3 MFC set to  0.000000
8/27/2011	8:46:17 PM	SiCl4 MFC set to  0.000000
8/27/2011	8:46:17 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	8:46:17 PM	Tube furnace set to 0
8/27/2011	8:46:26 PM	Helium valve closed
8/27/2011	8:46:26 PM	H2 valve closed
8/27/2011	8:46:26 PM	BCl3 valve closed
8/27/2011	8:46:26 PM	PH3 valve closed
8/27/2011	8:46:26 PM	SiCl4 pre valve closed
8/27/2011	8:46:26 PM	SiCl4 post valve closed
8/27/2011	8:46:26 PM	Main Vac valve closed
8/27/2011	8:46:26 PM	Bypass valve closed
8/27/2011	8:46:26 PM	Bubbler valve closed
8/27/2011	8:46:26 PM	Helium MFC set to  0.000000
8/27/2011	8:46:26 PM	H2 MFC set to  0.000000
8/27/2011	8:46:26 PM	BCl3 MFC set to  0.000000
8/27/2011	8:46:26 PM	PHl3 MFC set to  0.000000
8/27/2011	8:46:26 PM	SiCl4 MFC set to  0.000000
8/27/2011	8:46:26 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	8:46:26 PM	Tube furnace set to 0
8/27/2011	8:46:27 PM	Run finished at 8:46 PM
8/27/2011	8:46:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/27/2011	8:47:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/27/2011	8:47:55 PM	Recipe started at 8:47 PM
8/27/2011	8:47:55 PM	Helium valve closed
8/27/2011	8:47:55 PM	H2 valve closed
8/27/2011	8:47:55 PM	BCl3 valve closed
8/27/2011	8:47:55 PM	PH3 valve closed
8/27/2011	8:47:55 PM	SiCl4 pre valve closed
8/27/2011	8:47:55 PM	SiCl4 post valve closed
8/27/2011	8:47:55 PM	Main Vac valve closed
8/27/2011	8:47:55 PM	Bubbler valve closed
8/27/2011	8:47:55 PM	Bypass valve opened
8/27/2011	8:47:55 PM	Helium MFC set to  0.000000
8/27/2011	8:47:55 PM	H2 MFC set to  0.000000
8/27/2011	8:47:55 PM	BCl3 MFC set to  0.000000
8/27/2011	8:47:55 PM	PHl3 MFC set to  0.000000
8/27/2011	8:47:55 PM	SiCl4 MFC set to  0.000000
8/27/2011	8:47:55 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	8:47:55 PM	Tube furnace set to 0
8/27/2011	8:48:58 PM	Helium valve closed
8/27/2011	8:48:58 PM	H2 valve closed
8/27/2011	8:48:58 PM	BCl3 valve closed
8/27/2011	8:48:58 PM	PH3 valve closed
8/27/2011	8:48:58 PM	SiCl4 pre valve closed
8/27/2011	8:48:58 PM	SiCl4 post valve closed
8/27/2011	8:48:58 PM	Main Vac valve closed
8/27/2011	8:48:58 PM	Bubbler valve closed
8/27/2011	8:48:58 PM	Bypass valve opened
8/27/2011	8:48:58 PM	Helium MFC set to  0.000000
8/27/2011	8:48:58 PM	H2 MFC set to  0.000000
8/27/2011	8:48:58 PM	BCl3 MFC set to  0.000000
8/27/2011	8:48:58 PM	PHl3 MFC set to  0.000000
8/27/2011	8:48:58 PM	SiCl4 MFC set to  0.000000
8/27/2011	8:48:58 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	8:48:58 PM	Tube furnace set to 0
8/27/2011	8:49:05 PM	Helium valve closed
8/27/2011	8:49:05 PM	H2 valve closed
8/27/2011	8:49:05 PM	BCl3 valve closed
8/27/2011	8:49:05 PM	PH3 valve closed
8/27/2011	8:49:05 PM	SiCl4 pre valve closed
8/27/2011	8:49:05 PM	SiCl4 post valve closed
8/27/2011	8:49:05 PM	Bypass valve closed
8/27/2011	8:49:05 PM	Bubbler valve closed
8/27/2011	8:49:05 PM	Main Vac valve opened
8/27/2011	8:49:05 PM	Helium MFC set to  0.000000
8/27/2011	8:49:05 PM	H2 MFC set to  0.000000
8/27/2011	8:49:05 PM	BCl3 MFC set to  0.000000
8/27/2011	8:49:05 PM	PHl3 MFC set to  0.000000
8/27/2011	8:49:05 PM	SiCl4 MFC set to  0.000000
8/27/2011	8:49:05 PM	Bypass solenoid MFC set to  0.000000
8/27/2011	8:49:05 PM	Tube furnace set to 0
8/27/2011	8:49:06 PM	Run finished at 8:49 PM
8/27/2011	8:49:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
